4/2/2011	9:59:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2011	9:59:30 AM	Recipe started at 9:59 AM
4/2/2011	9:59:30 AM	H2 valve closed
4/2/2011	9:59:30 AM	BCl3 valve closed
4/2/2011	9:59:30 AM	PH3 valve closed
4/2/2011	9:59:30 AM	SiCl4 pre valve closed
4/2/2011	9:59:30 AM	SiCl4 post valve closed
4/2/2011	9:59:30 AM	Main Vac valve closed
4/2/2011	9:59:30 AM	Bypass valve closed
4/2/2011	9:59:30 AM	Bubbler valve closed
4/2/2011	9:59:30 AM	Helium valve opened
4/2/2011	9:59:30 AM	Helium MFC set to  500.000000
4/2/2011	9:59:30 AM	H2 MFC set to  0.000000
4/2/2011	9:59:30 AM	BCl3 MFC set to  0.000000
4/2/2011	9:59:30 AM	PHl3 MFC set to  0.000000
4/2/2011	9:59:30 AM	SiCl4 MFC set to  0.000000
4/2/2011	9:59:30 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	9:59:30 AM	Tube furnace set to 0
4/2/2011	10:00:50 AM	Helium valve closed
4/2/2011	10:00:50 AM	H2 valve closed
4/2/2011	10:00:50 AM	BCl3 valve closed
4/2/2011	10:00:50 AM	PH3 valve closed
4/2/2011	10:00:50 AM	SiCl4 pre valve closed
4/2/2011	10:00:50 AM	SiCl4 post valve closed
4/2/2011	10:00:50 AM	Main Vac valve closed
4/2/2011	10:00:50 AM	Bypass valve closed
4/2/2011	10:00:50 AM	Bubbler valve closed
4/2/2011	10:00:50 AM	Helium MFC set to  0.000000
4/2/2011	10:00:50 AM	H2 MFC set to  0.000000
4/2/2011	10:00:50 AM	BCl3 MFC set to  0.000000
4/2/2011	10:00:50 AM	PHl3 MFC set to  0.000000
4/2/2011	10:00:50 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:00:50 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:00:50 AM	Tube furnace set to 0
4/2/2011	10:00:50 AM	Run finished at 10:00 AM
4/2/2011	10:00:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2011	10:07:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	10:07:18 AM	Recipe started at 10:07 AM
4/2/2011	10:07:18 AM	Helium valve closed
4/2/2011	10:07:18 AM	H2 valve closed
4/2/2011	10:07:18 AM	BCl3 valve closed
4/2/2011	10:07:18 AM	PH3 valve closed
4/2/2011	10:07:18 AM	SiCl4 pre valve closed
4/2/2011	10:07:18 AM	SiCl4 post valve closed
4/2/2011	10:07:18 AM	Main Vac valve closed
4/2/2011	10:07:18 AM	Bubbler valve closed
4/2/2011	10:07:18 AM	Bypass valve opened
4/2/2011	10:07:18 AM	Helium MFC set to  0.000000
4/2/2011	10:07:18 AM	H2 MFC set to  0.000000
4/2/2011	10:07:18 AM	BCl3 MFC set to  0.000000
4/2/2011	10:07:18 AM	PHl3 MFC set to  0.000000
4/2/2011	10:07:18 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:07:18 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:07:18 AM	Tube furnace set to 0
4/2/2011	10:07:50 AM	Helium valve closed
4/2/2011	10:07:50 AM	H2 valve closed
4/2/2011	10:07:50 AM	BCl3 valve closed
4/2/2011	10:07:50 AM	PH3 valve closed
4/2/2011	10:07:50 AM	SiCl4 pre valve closed
4/2/2011	10:07:50 AM	SiCl4 post valve closed
4/2/2011	10:07:50 AM	Bubbler valve closed
4/2/2011	10:07:50 AM	Main Vac valve opened
4/2/2011	10:07:50 AM	Bypass valve opened
4/2/2011	10:07:50 AM	Helium MFC set to  0.000000
4/2/2011	10:07:50 AM	H2 MFC set to  0.000000
4/2/2011	10:07:50 AM	BCl3 MFC set to  0.000000
4/2/2011	10:07:50 AM	PHl3 MFC set to  0.000000
4/2/2011	10:07:50 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:07:50 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:07:50 AM	Tube furnace set to 0
4/2/2011	10:07:50 AM	Run finished at 10:07 AM
4/2/2011	10:07:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	10:09:53 AM	Tube furnace set to 400
4/2/2011	10:11:19 AM	Helium MFC set to  50.000000
4/2/2011	10:11:20 AM	Helium valve opened
4/2/2011	10:11:30 AM	Helium valve closed
4/2/2011	10:11:33 AM	Helium MFC set to  0.000000
4/2/2011	10:11:35 AM	Helium valve opened
4/2/2011	10:11:36 AM	Helium valve closed
4/2/2011	10:12:03 AM	Bypass valve closed
4/2/2011	10:12:04 AM	Main Vac valve closed
4/2/2011	10:12:13 AM	Main Vac valve opened
4/2/2011	10:12:16 AM	Bypass valve opened
4/2/2011	10:12:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/2/2011	10:12:29 AM	Recipe started at 10:12 AM
4/2/2011	10:12:29 AM	Helium valve closed
4/2/2011	10:12:29 AM	H2 valve closed
4/2/2011	10:12:29 AM	BCl3 valve closed
4/2/2011	10:12:29 AM	PH3 valve closed
4/2/2011	10:12:29 AM	SiCl4 pre valve closed
4/2/2011	10:12:29 AM	SiCl4 post valve closed
4/2/2011	10:12:29 AM	Main Vac valve closed
4/2/2011	10:12:29 AM	Bubbler valve closed
4/2/2011	10:12:29 AM	Bypass valve opened
4/2/2011	10:12:29 AM	Helium MFC set to  0.000000
4/2/2011	10:12:29 AM	H2 MFC set to  0.000000
4/2/2011	10:12:29 AM	BCl3 MFC set to  0.000000
4/2/2011	10:12:29 AM	PHl3 MFC set to  0.000000
4/2/2011	10:12:29 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:12:29 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:12:29 AM	Tube furnace set to 0
4/2/2011	10:12:30 AM	Helium valve closed
4/2/2011	10:12:30 AM	H2 valve closed
4/2/2011	10:12:30 AM	BCl3 valve closed
4/2/2011	10:12:30 AM	PH3 valve closed
4/2/2011	10:12:30 AM	SiCl4 pre valve closed
4/2/2011	10:12:30 AM	SiCl4 post valve closed
4/2/2011	10:12:30 AM	Bubbler valve closed
4/2/2011	10:12:30 AM	Main Vac valve opened
4/2/2011	10:12:30 AM	Bypass valve opened
4/2/2011	10:12:30 AM	Helium MFC set to  0.000000
4/2/2011	10:12:30 AM	H2 MFC set to  0.000000
4/2/2011	10:12:30 AM	BCl3 MFC set to  0.000000
4/2/2011	10:12:30 AM	PHl3 MFC set to  0.000000
4/2/2011	10:12:30 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:12:30 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:12:30 AM	Tube furnace set to 0
4/2/2011	10:13:30 AM	H2 valve closed
4/2/2011	10:13:30 AM	BCl3 valve closed
4/2/2011	10:13:30 AM	PH3 valve closed
4/2/2011	10:13:30 AM	SiCl4 pre valve closed
4/2/2011	10:13:30 AM	SiCl4 post valve closed
4/2/2011	10:13:30 AM	Bubbler valve closed
4/2/2011	10:13:30 AM	Helium valve opened
4/2/2011	10:13:30 AM	Main Vac valve opened
4/2/2011	10:13:30 AM	Bypass valve opened
4/2/2011	10:13:30 AM	Helium MFC set to  100.000000
4/2/2011	10:13:30 AM	H2 MFC set to  0.000000
4/2/2011	10:13:30 AM	BCl3 MFC set to  0.000000
4/2/2011	10:13:30 AM	PHl3 MFC set to  0.000000
4/2/2011	10:13:30 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:13:30 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:13:30 AM	Tube furnace set to 0
4/2/2011	10:14:30 AM	Helium valve closed
4/2/2011	10:14:30 AM	H2 valve closed
4/2/2011	10:14:30 AM	BCl3 valve closed
4/2/2011	10:14:30 AM	PH3 valve closed
4/2/2011	10:14:30 AM	SiCl4 pre valve closed
4/2/2011	10:14:30 AM	SiCl4 post valve closed
4/2/2011	10:14:30 AM	Bubbler valve closed
4/2/2011	10:14:30 AM	Main Vac valve opened
4/2/2011	10:14:30 AM	Bypass valve opened
4/2/2011	10:14:30 AM	Helium MFC set to  0.000000
4/2/2011	10:14:30 AM	H2 MFC set to  0.000000
4/2/2011	10:14:30 AM	BCl3 MFC set to  0.000000
4/2/2011	10:14:30 AM	PHl3 MFC set to  0.000000
4/2/2011	10:14:30 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:14:30 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:14:30 AM	Tube furnace set to 0
4/2/2011	10:15:30 AM	H2 valve closed
4/2/2011	10:15:30 AM	BCl3 valve closed
4/2/2011	10:15:30 AM	PH3 valve closed
4/2/2011	10:15:30 AM	SiCl4 pre valve closed
4/2/2011	10:15:30 AM	SiCl4 post valve closed
4/2/2011	10:15:30 AM	Bubbler valve closed
4/2/2011	10:15:30 AM	Helium valve opened
4/2/2011	10:15:30 AM	Main Vac valve opened
4/2/2011	10:15:30 AM	Bypass valve opened
4/2/2011	10:15:30 AM	Helium MFC set to  100.000000
4/2/2011	10:15:30 AM	H2 MFC set to  0.000000
4/2/2011	10:15:30 AM	BCl3 MFC set to  0.000000
4/2/2011	10:15:30 AM	PHl3 MFC set to  0.000000
4/2/2011	10:15:30 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:15:30 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:15:31 AM	Tube furnace set to 0
4/2/2011	10:16:31 AM	Helium valve closed
4/2/2011	10:16:31 AM	H2 valve closed
4/2/2011	10:16:31 AM	BCl3 valve closed
4/2/2011	10:16:31 AM	PH3 valve closed
4/2/2011	10:16:31 AM	SiCl4 pre valve closed
4/2/2011	10:16:31 AM	SiCl4 post valve closed
4/2/2011	10:16:31 AM	Bubbler valve closed
4/2/2011	10:16:31 AM	Main Vac valve opened
4/2/2011	10:16:31 AM	Bypass valve opened
4/2/2011	10:16:31 AM	Helium MFC set to  0.000000
4/2/2011	10:16:31 AM	H2 MFC set to  0.000000
4/2/2011	10:16:31 AM	BCl3 MFC set to  0.000000
4/2/2011	10:16:31 AM	PHl3 MFC set to  0.000000
4/2/2011	10:16:31 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:16:31 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:16:31 AM	Tube furnace set to 0
4/2/2011	10:17:31 AM	H2 valve closed
4/2/2011	10:17:31 AM	BCl3 valve closed
4/2/2011	10:17:31 AM	PH3 valve closed
4/2/2011	10:17:31 AM	SiCl4 pre valve closed
4/2/2011	10:17:31 AM	SiCl4 post valve closed
4/2/2011	10:17:31 AM	Bubbler valve closed
4/2/2011	10:17:31 AM	Helium valve opened
4/2/2011	10:17:31 AM	Main Vac valve opened
4/2/2011	10:17:31 AM	Bypass valve opened
4/2/2011	10:17:31 AM	Helium MFC set to  100.000000
4/2/2011	10:17:31 AM	H2 MFC set to  0.000000
4/2/2011	10:17:31 AM	BCl3 MFC set to  0.000000
4/2/2011	10:17:31 AM	PHl3 MFC set to  0.000000
4/2/2011	10:17:31 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:17:31 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:17:31 AM	Tube furnace set to 0
4/2/2011	10:18:31 AM	Helium valve closed
4/2/2011	10:18:31 AM	H2 valve closed
4/2/2011	10:18:31 AM	BCl3 valve closed
4/2/2011	10:18:31 AM	PH3 valve closed
4/2/2011	10:18:31 AM	SiCl4 pre valve closed
4/2/2011	10:18:31 AM	SiCl4 post valve closed
4/2/2011	10:18:31 AM	Bubbler valve closed
4/2/2011	10:18:31 AM	Main Vac valve opened
4/2/2011	10:18:31 AM	Bypass valve opened
4/2/2011	10:18:31 AM	Helium MFC set to  0.000000
4/2/2011	10:18:31 AM	H2 MFC set to  0.000000
4/2/2011	10:18:31 AM	BCl3 MFC set to  0.000000
4/2/2011	10:18:31 AM	PHl3 MFC set to  0.000000
4/2/2011	10:18:31 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:18:31 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:18:31 AM	Tube furnace set to 0
4/2/2011	10:19:31 AM	H2 valve closed
4/2/2011	10:19:31 AM	BCl3 valve closed
4/2/2011	10:19:31 AM	PH3 valve closed
4/2/2011	10:19:31 AM	SiCl4 pre valve closed
4/2/2011	10:19:31 AM	SiCl4 post valve closed
4/2/2011	10:19:31 AM	Bubbler valve closed
4/2/2011	10:19:31 AM	Helium valve opened
4/2/2011	10:19:31 AM	Main Vac valve opened
4/2/2011	10:19:31 AM	Bypass valve opened
4/2/2011	10:19:31 AM	Helium MFC set to  100.000000
4/2/2011	10:19:31 AM	H2 MFC set to  0.000000
4/2/2011	10:19:31 AM	BCl3 MFC set to  0.000000
4/2/2011	10:19:31 AM	PHl3 MFC set to  0.000000
4/2/2011	10:19:31 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:19:31 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:19:31 AM	Tube furnace set to 0
4/2/2011	10:20:31 AM	Helium valve closed
4/2/2011	10:20:31 AM	H2 valve closed
4/2/2011	10:20:31 AM	BCl3 valve closed
4/2/2011	10:20:31 AM	PH3 valve closed
4/2/2011	10:20:31 AM	SiCl4 pre valve closed
4/2/2011	10:20:31 AM	SiCl4 post valve closed
4/2/2011	10:20:31 AM	Bubbler valve closed
4/2/2011	10:20:31 AM	Main Vac valve opened
4/2/2011	10:20:31 AM	Bypass valve opened
4/2/2011	10:20:31 AM	Helium MFC set to  0.000000
4/2/2011	10:20:31 AM	H2 MFC set to  0.000000
4/2/2011	10:20:31 AM	BCl3 MFC set to  0.000000
4/2/2011	10:20:31 AM	PHl3 MFC set to  0.000000
4/2/2011	10:20:31 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:20:31 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:20:31 AM	Tube furnace set to 0
4/2/2011	10:21:32 AM	H2 valve closed
4/2/2011	10:21:32 AM	BCl3 valve closed
4/2/2011	10:21:32 AM	PH3 valve closed
4/2/2011	10:21:32 AM	SiCl4 pre valve closed
4/2/2011	10:21:32 AM	SiCl4 post valve closed
4/2/2011	10:21:32 AM	Bubbler valve closed
4/2/2011	10:21:32 AM	Helium valve opened
4/2/2011	10:21:32 AM	Main Vac valve opened
4/2/2011	10:21:32 AM	Bypass valve opened
4/2/2011	10:21:32 AM	Helium MFC set to  100.000000
4/2/2011	10:21:32 AM	H2 MFC set to  0.000000
4/2/2011	10:21:32 AM	BCl3 MFC set to  0.000000
4/2/2011	10:21:32 AM	PHl3 MFC set to  0.000000
4/2/2011	10:21:32 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:21:32 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:21:32 AM	Tube furnace set to 0
4/2/2011	10:22:32 AM	Helium valve closed
4/2/2011	10:22:32 AM	H2 valve closed
4/2/2011	10:22:32 AM	BCl3 valve closed
4/2/2011	10:22:32 AM	PH3 valve closed
4/2/2011	10:22:32 AM	SiCl4 pre valve closed
4/2/2011	10:22:32 AM	SiCl4 post valve closed
4/2/2011	10:22:32 AM	Bubbler valve closed
4/2/2011	10:22:32 AM	Main Vac valve opened
4/2/2011	10:22:32 AM	Bypass valve opened
4/2/2011	10:22:32 AM	Helium MFC set to  0.000000
4/2/2011	10:22:32 AM	H2 MFC set to  0.000000
4/2/2011	10:22:32 AM	BCl3 MFC set to  0.000000
4/2/2011	10:22:32 AM	PHl3 MFC set to  0.000000
4/2/2011	10:22:32 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:22:32 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:22:32 AM	Tube furnace set to 0
4/2/2011	10:23:32 AM	H2 valve closed
4/2/2011	10:23:32 AM	BCl3 valve closed
4/2/2011	10:23:32 AM	PH3 valve closed
4/2/2011	10:23:32 AM	SiCl4 pre valve closed
4/2/2011	10:23:32 AM	SiCl4 post valve closed
4/2/2011	10:23:32 AM	Bubbler valve closed
4/2/2011	10:23:32 AM	Helium valve opened
4/2/2011	10:23:32 AM	Main Vac valve opened
4/2/2011	10:23:32 AM	Bypass valve opened
4/2/2011	10:23:32 AM	Helium MFC set to  100.000000
4/2/2011	10:23:32 AM	H2 MFC set to  0.000000
4/2/2011	10:23:32 AM	BCl3 MFC set to  0.000000
4/2/2011	10:23:32 AM	PHl3 MFC set to  0.000000
4/2/2011	10:23:32 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:23:32 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:23:32 AM	Tube furnace set to 0
4/2/2011	10:24:32 AM	Helium valve closed
4/2/2011	10:24:32 AM	H2 valve closed
4/2/2011	10:24:32 AM	BCl3 valve closed
4/2/2011	10:24:32 AM	PH3 valve closed
4/2/2011	10:24:32 AM	SiCl4 pre valve closed
4/2/2011	10:24:32 AM	SiCl4 post valve closed
4/2/2011	10:24:32 AM	Bubbler valve closed
4/2/2011	10:24:32 AM	Main Vac valve opened
4/2/2011	10:24:32 AM	Bypass valve opened
4/2/2011	10:24:32 AM	Helium MFC set to  0.000000
4/2/2011	10:24:32 AM	H2 MFC set to  0.000000
4/2/2011	10:24:32 AM	BCl3 MFC set to  0.000000
4/2/2011	10:24:32 AM	PHl3 MFC set to  0.000000
4/2/2011	10:24:32 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:24:32 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:24:32 AM	Tube furnace set to 0
4/2/2011	10:25:32 AM	H2 valve closed
4/2/2011	10:25:32 AM	BCl3 valve closed
4/2/2011	10:25:32 AM	PH3 valve closed
4/2/2011	10:25:32 AM	SiCl4 pre valve closed
4/2/2011	10:25:32 AM	SiCl4 post valve closed
4/2/2011	10:25:32 AM	Bubbler valve closed
4/2/2011	10:25:32 AM	Helium valve opened
4/2/2011	10:25:32 AM	Main Vac valve opened
4/2/2011	10:25:32 AM	Bypass valve opened
4/2/2011	10:25:32 AM	Helium MFC set to  100.000000
4/2/2011	10:25:32 AM	H2 MFC set to  0.000000
4/2/2011	10:25:32 AM	BCl3 MFC set to  0.000000
4/2/2011	10:25:32 AM	PHl3 MFC set to  0.000000
4/2/2011	10:25:32 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:25:32 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:25:32 AM	Tube furnace set to 0
4/2/2011	10:26:33 AM	Helium valve closed
4/2/2011	10:26:33 AM	H2 valve closed
4/2/2011	10:26:33 AM	BCl3 valve closed
4/2/2011	10:26:33 AM	PH3 valve closed
4/2/2011	10:26:33 AM	SiCl4 pre valve closed
4/2/2011	10:26:33 AM	SiCl4 post valve closed
4/2/2011	10:26:33 AM	Bubbler valve closed
4/2/2011	10:26:33 AM	Main Vac valve opened
4/2/2011	10:26:33 AM	Bypass valve opened
4/2/2011	10:26:33 AM	Helium MFC set to  0.000000
4/2/2011	10:26:33 AM	H2 MFC set to  0.000000
4/2/2011	10:26:33 AM	BCl3 MFC set to  0.000000
4/2/2011	10:26:33 AM	PHl3 MFC set to  0.000000
4/2/2011	10:26:33 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:26:33 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:26:33 AM	Tube furnace set to 0
4/2/2011	10:27:33 AM	H2 valve closed
4/2/2011	10:27:33 AM	BCl3 valve closed
4/2/2011	10:27:33 AM	PH3 valve closed
4/2/2011	10:27:33 AM	SiCl4 pre valve closed
4/2/2011	10:27:33 AM	SiCl4 post valve closed
4/2/2011	10:27:33 AM	Bubbler valve closed
4/2/2011	10:27:33 AM	Helium valve opened
4/2/2011	10:27:33 AM	Main Vac valve opened
4/2/2011	10:27:33 AM	Bypass valve opened
4/2/2011	10:27:33 AM	Helium MFC set to  100.000000
4/2/2011	10:27:33 AM	H2 MFC set to  0.000000
4/2/2011	10:27:33 AM	BCl3 MFC set to  0.000000
4/2/2011	10:27:33 AM	PHl3 MFC set to  0.000000
4/2/2011	10:27:33 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:27:33 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:27:33 AM	Tube furnace set to 0
4/2/2011	10:28:33 AM	Helium valve closed
4/2/2011	10:28:33 AM	H2 valve closed
4/2/2011	10:28:33 AM	BCl3 valve closed
4/2/2011	10:28:33 AM	PH3 valve closed
4/2/2011	10:28:33 AM	SiCl4 pre valve closed
4/2/2011	10:28:33 AM	SiCl4 post valve closed
4/2/2011	10:28:33 AM	Bubbler valve closed
4/2/2011	10:28:33 AM	Main Vac valve opened
4/2/2011	10:28:33 AM	Bypass valve opened
4/2/2011	10:28:33 AM	Helium MFC set to  0.000000
4/2/2011	10:28:33 AM	H2 MFC set to  0.000000
4/2/2011	10:28:33 AM	BCl3 MFC set to  0.000000
4/2/2011	10:28:33 AM	PHl3 MFC set to  0.000000
4/2/2011	10:28:33 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:28:33 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:28:33 AM	Tube furnace set to 0
4/2/2011	10:29:33 AM	H2 valve closed
4/2/2011	10:29:33 AM	BCl3 valve closed
4/2/2011	10:29:33 AM	PH3 valve closed
4/2/2011	10:29:33 AM	SiCl4 pre valve closed
4/2/2011	10:29:33 AM	SiCl4 post valve closed
4/2/2011	10:29:33 AM	Bubbler valve closed
4/2/2011	10:29:33 AM	Helium valve opened
4/2/2011	10:29:33 AM	Main Vac valve opened
4/2/2011	10:29:33 AM	Bypass valve opened
4/2/2011	10:29:33 AM	Helium MFC set to  100.000000
4/2/2011	10:29:33 AM	H2 MFC set to  0.000000
4/2/2011	10:29:33 AM	BCl3 MFC set to  0.000000
4/2/2011	10:29:33 AM	PHl3 MFC set to  0.000000
4/2/2011	10:29:33 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:29:33 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:29:33 AM	Tube furnace set to 0
4/2/2011	10:30:33 AM	Helium valve closed
4/2/2011	10:30:33 AM	H2 valve closed
4/2/2011	10:30:33 AM	BCl3 valve closed
4/2/2011	10:30:33 AM	PH3 valve closed
4/2/2011	10:30:33 AM	SiCl4 pre valve closed
4/2/2011	10:30:33 AM	SiCl4 post valve closed
4/2/2011	10:30:33 AM	Bubbler valve closed
4/2/2011	10:30:33 AM	Main Vac valve opened
4/2/2011	10:30:33 AM	Bypass valve opened
4/2/2011	10:30:33 AM	Helium MFC set to  0.000000
4/2/2011	10:30:33 AM	H2 MFC set to  0.000000
4/2/2011	10:30:33 AM	BCl3 MFC set to  0.000000
4/2/2011	10:30:33 AM	PHl3 MFC set to  0.000000
4/2/2011	10:30:33 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:30:33 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:30:33 AM	Tube furnace set to 0
4/2/2011	10:31:33 AM	H2 valve closed
4/2/2011	10:31:33 AM	BCl3 valve closed
4/2/2011	10:31:33 AM	PH3 valve closed
4/2/2011	10:31:33 AM	SiCl4 pre valve closed
4/2/2011	10:31:33 AM	SiCl4 post valve closed
4/2/2011	10:31:33 AM	Bubbler valve closed
4/2/2011	10:31:34 AM	Helium valve opened
4/2/2011	10:31:34 AM	Main Vac valve opened
4/2/2011	10:31:34 AM	Bypass valve opened
4/2/2011	10:31:34 AM	Helium MFC set to  100.000000
4/2/2011	10:31:34 AM	H2 MFC set to  0.000000
4/2/2011	10:31:34 AM	BCl3 MFC set to  0.000000
4/2/2011	10:31:34 AM	PHl3 MFC set to  0.000000
4/2/2011	10:31:34 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:31:34 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:31:34 AM	Tube furnace set to 0
4/2/2011	10:32:34 AM	Helium valve closed
4/2/2011	10:32:34 AM	H2 valve closed
4/2/2011	10:32:34 AM	BCl3 valve closed
4/2/2011	10:32:34 AM	PH3 valve closed
4/2/2011	10:32:34 AM	SiCl4 pre valve closed
4/2/2011	10:32:34 AM	SiCl4 post valve closed
4/2/2011	10:32:34 AM	Bubbler valve closed
4/2/2011	10:32:34 AM	Main Vac valve opened
4/2/2011	10:32:34 AM	Bypass valve opened
4/2/2011	10:32:34 AM	Helium MFC set to  0.000000
4/2/2011	10:32:34 AM	H2 MFC set to  0.000000
4/2/2011	10:32:34 AM	BCl3 MFC set to  0.000000
4/2/2011	10:32:34 AM	PHl3 MFC set to  0.000000
4/2/2011	10:32:34 AM	SiCl4 MFC set to  0.000000
4/2/2011	10:32:34 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	10:32:34 AM	Tube furnace set to 0
4/2/2011	10:32:35 AM	Run finished at 10:32 AM
4/2/2011	10:32:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/2/2011	11:09:07 AM	Helium valve opened
4/2/2011	11:09:10 AM	Helium MFC set to  100.000000
4/2/2011	11:09:53 AM	Helium MFC set to  0.000000
4/2/2011	11:09:56 AM	Helium valve closed
4/2/2011	11:10:37 AM	Recipe started at 11:10 AM
4/2/2011	11:10:37 AM	Helium valve closed
4/2/2011	11:10:37 AM	BCl3 valve closed
4/2/2011	11:10:37 AM	PH3 valve closed
4/2/2011	11:10:37 AM	SiCl4 pre valve closed
4/2/2011	11:10:37 AM	SiCl4 post valve closed
4/2/2011	11:10:37 AM	Main Vac valve closed
4/2/2011	11:10:37 AM	Bypass valve closed
4/2/2011	11:10:37 AM	Bubbler valve closed
4/2/2011	11:10:37 AM	H2 valve opened
4/2/2011	11:10:37 AM	Helium MFC set to  0.000000
4/2/2011	11:10:37 AM	H2 MFC set to  500.000000
4/2/2011	11:10:37 AM	BCl3 MFC set to  0.000000
4/2/2011	11:10:37 AM	PHl3 MFC set to  0.000000
4/2/2011	11:10:37 AM	SiCl4 MFC set to  0.000000
4/2/2011	11:10:37 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	11:10:37 AM	Tube furnace set to 0
4/2/2011	11:11:57 AM	Helium valve closed
4/2/2011	11:11:57 AM	BCl3 valve closed
4/2/2011	11:11:57 AM	PH3 valve closed
4/2/2011	11:11:57 AM	SiCl4 pre valve closed
4/2/2011	11:11:57 AM	SiCl4 post valve closed
4/2/2011	11:11:57 AM	Main Vac valve closed
4/2/2011	11:11:57 AM	Bypass valve closed
4/2/2011	11:11:57 AM	H2 valve opened
4/2/2011	11:11:57 AM	Bubbler valve opened
4/2/2011	11:11:57 AM	Helium MFC set to  0.000000
4/2/2011	11:11:57 AM	H2 MFC set to  500.000000
4/2/2011	11:11:57 AM	BCl3 MFC set to  0.000000
4/2/2011	11:11:57 AM	PHl3 MFC set to  0.000000
4/2/2011	11:11:57 AM	SiCl4 MFC set to  0.000000
4/2/2011	11:11:57 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	11:11:57 AM	Tube furnace set to 1050
4/2/2011	11:31:57 AM	Helium valve closed
4/2/2011	11:31:57 AM	BCl3 valve closed
4/2/2011	11:31:57 AM	PH3 valve closed
4/2/2011	11:31:57 AM	Main Vac valve closed
4/2/2011	11:31:57 AM	Bypass valve closed
4/2/2011	11:31:57 AM	H2 valve opened
4/2/2011	11:31:57 AM	SiCl4 pre valve opened
4/2/2011	11:31:57 AM	SiCl4 post valve opened
4/2/2011	11:31:57 AM	Bubbler valve opened
4/2/2011	11:31:57 AM	Helium MFC set to  0.000000
4/2/2011	11:31:57 AM	H2 MFC set to  500.000000
4/2/2011	11:31:57 AM	BCl3 MFC set to  0.000000
4/2/2011	11:31:57 AM	PHl3 MFC set to  0.000000
4/2/2011	11:31:57 AM	SiCl4 MFC set to  50.000000
4/2/2011	11:31:57 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	11:31:57 AM	Tube furnace set to 1050
4/2/2011	11:51:57 AM	H2 valve closed
4/2/2011	11:51:57 AM	BCl3 valve closed
4/2/2011	11:51:57 AM	PH3 valve closed
4/2/2011	11:51:57 AM	SiCl4 pre valve closed
4/2/2011	11:51:57 AM	SiCl4 post valve closed
4/2/2011	11:51:57 AM	Main Vac valve closed
4/2/2011	11:51:57 AM	Bypass valve closed
4/2/2011	11:51:57 AM	Helium valve opened
4/2/2011	11:51:57 AM	Bubbler valve opened
4/2/2011	11:51:57 AM	Helium MFC set to  500.000000
4/2/2011	11:51:57 AM	H2 MFC set to  0.000000
4/2/2011	11:51:57 AM	BCl3 MFC set to  0.000000
4/2/2011	11:51:57 AM	PHl3 MFC set to  0.000000
4/2/2011	11:51:57 AM	SiCl4 MFC set to  0.000000
4/2/2011	11:51:57 AM	Bypass solenoid MFC set to  0.000000
4/2/2011	11:51:58 AM	Tube furnace set to 0
4/2/2011	12:11:58 PM	Helium valve closed
4/2/2011	12:11:58 PM	H2 valve closed
4/2/2011	12:11:58 PM	BCl3 valve closed
4/2/2011	12:11:58 PM	PH3 valve closed
4/2/2011	12:11:58 PM	SiCl4 pre valve closed
4/2/2011	12:11:58 PM	SiCl4 post valve closed
4/2/2011	12:11:58 PM	Main Vac valve closed
4/2/2011	12:11:58 PM	Bypass valve closed
4/2/2011	12:11:58 PM	Bubbler valve closed
4/2/2011	12:11:58 PM	Helium MFC set to  0.000000
4/2/2011	12:11:58 PM	H2 MFC set to  0.000000
4/2/2011	12:11:58 PM	BCl3 MFC set to  0.000000
4/2/2011	12:11:58 PM	PHl3 MFC set to  0.000000
4/2/2011	12:11:58 PM	SiCl4 MFC set to  0.000000
4/2/2011	12:11:58 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	12:11:58 PM	Tube furnace set to 0
4/2/2011	12:11:58 PM	Run finished at 12:11 PM
4/2/2011	1:02:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2011	1:02:13 PM	Recipe started at 1:02 PM
4/2/2011	1:02:13 PM	H2 valve closed
4/2/2011	1:02:13 PM	BCl3 valve closed
4/2/2011	1:02:13 PM	PH3 valve closed
4/2/2011	1:02:13 PM	SiCl4 pre valve closed
4/2/2011	1:02:13 PM	SiCl4 post valve closed
4/2/2011	1:02:13 PM	Main Vac valve closed
4/2/2011	1:02:13 PM	Bypass valve closed
4/2/2011	1:02:13 PM	Bubbler valve closed
4/2/2011	1:02:13 PM	Helium valve opened
4/2/2011	1:02:13 PM	Helium MFC set to  500.000000
4/2/2011	1:02:13 PM	H2 MFC set to  0.000000
4/2/2011	1:02:13 PM	BCl3 MFC set to  0.000000
4/2/2011	1:02:13 PM	PHl3 MFC set to  0.000000
4/2/2011	1:02:13 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:02:13 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:02:13 PM	Tube furnace set to 0
4/2/2011	1:02:16 PM	Helium valve closed
4/2/2011	1:02:16 PM	H2 valve closed
4/2/2011	1:02:16 PM	BCl3 valve closed
4/2/2011	1:02:16 PM	PH3 valve closed
4/2/2011	1:02:16 PM	SiCl4 pre valve closed
4/2/2011	1:02:16 PM	SiCl4 post valve closed
4/2/2011	1:02:16 PM	Main Vac valve closed
4/2/2011	1:02:16 PM	Bypass valve closed
4/2/2011	1:02:16 PM	Bubbler valve closed
4/2/2011	1:02:16 PM	Helium MFC set to  0.000000
4/2/2011	1:02:16 PM	H2 MFC set to  0.000000
4/2/2011	1:02:16 PM	BCl3 MFC set to  0.000000
4/2/2011	1:02:16 PM	PHl3 MFC set to  0.000000
4/2/2011	1:02:16 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:02:16 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:02:16 PM	Tube furnace set to 0
4/2/2011	1:02:16 PM	Run finished at 1:02 PM
4/2/2011	1:02:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2011	1:06:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	1:06:11 PM	Recipe started at 1:06 PM
4/2/2011	1:06:11 PM	Helium valve closed
4/2/2011	1:06:11 PM	H2 valve closed
4/2/2011	1:06:11 PM	BCl3 valve closed
4/2/2011	1:06:11 PM	PH3 valve closed
4/2/2011	1:06:11 PM	SiCl4 pre valve closed
4/2/2011	1:06:11 PM	SiCl4 post valve closed
4/2/2011	1:06:11 PM	Main Vac valve closed
4/2/2011	1:06:11 PM	Bubbler valve closed
4/2/2011	1:06:11 PM	Bypass valve opened
4/2/2011	1:06:11 PM	Helium MFC set to  0.000000
4/2/2011	1:06:11 PM	H2 MFC set to  0.000000
4/2/2011	1:06:11 PM	BCl3 MFC set to  0.000000
4/2/2011	1:06:11 PM	PHl3 MFC set to  0.000000
4/2/2011	1:06:11 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:06:11 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:06:11 PM	Tube furnace set to 0
4/2/2011	1:06:43 PM	Helium valve closed
4/2/2011	1:06:43 PM	H2 valve closed
4/2/2011	1:06:43 PM	BCl3 valve closed
4/2/2011	1:06:43 PM	PH3 valve closed
4/2/2011	1:06:43 PM	SiCl4 pre valve closed
4/2/2011	1:06:43 PM	SiCl4 post valve closed
4/2/2011	1:06:43 PM	Bubbler valve closed
4/2/2011	1:06:43 PM	Main Vac valve opened
4/2/2011	1:06:43 PM	Bypass valve opened
4/2/2011	1:06:43 PM	Helium MFC set to  0.000000
4/2/2011	1:06:43 PM	H2 MFC set to  0.000000
4/2/2011	1:06:43 PM	BCl3 MFC set to  0.000000
4/2/2011	1:06:43 PM	PHl3 MFC set to  0.000000
4/2/2011	1:06:43 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:06:43 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:06:43 PM	Tube furnace set to 0
4/2/2011	1:06:43 PM	Run finished at 1:06 PM
4/2/2011	1:06:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	1:07:44 PM	Bypass valve closed
4/2/2011	1:07:45 PM	Main Vac valve closed
4/2/2011	1:07:50 PM	Main Vac valve opened
4/2/2011	1:07:51 PM	Bypass valve opened
4/2/2011	1:07:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/2/2011	1:08:08 PM	Recipe started at 1:08 PM
4/2/2011	1:08:08 PM	Helium valve closed
4/2/2011	1:08:08 PM	H2 valve closed
4/2/2011	1:08:08 PM	BCl3 valve closed
4/2/2011	1:08:08 PM	PH3 valve closed
4/2/2011	1:08:08 PM	SiCl4 pre valve closed
4/2/2011	1:08:08 PM	SiCl4 post valve closed
4/2/2011	1:08:08 PM	Main Vac valve closed
4/2/2011	1:08:08 PM	Bubbler valve closed
4/2/2011	1:08:08 PM	Bypass valve opened
4/2/2011	1:08:08 PM	Helium MFC set to  0.000000
4/2/2011	1:08:08 PM	H2 MFC set to  0.000000
4/2/2011	1:08:08 PM	BCl3 MFC set to  0.000000
4/2/2011	1:08:08 PM	PHl3 MFC set to  0.000000
4/2/2011	1:08:08 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:08:08 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:08:08 PM	Tube furnace set to 0
4/2/2011	1:08:08 PM	Helium valve closed
4/2/2011	1:08:08 PM	H2 valve closed
4/2/2011	1:08:08 PM	BCl3 valve closed
4/2/2011	1:08:08 PM	PH3 valve closed
4/2/2011	1:08:08 PM	SiCl4 pre valve closed
4/2/2011	1:08:08 PM	SiCl4 post valve closed
4/2/2011	1:08:08 PM	Bubbler valve closed
4/2/2011	1:08:08 PM	Main Vac valve opened
4/2/2011	1:08:08 PM	Bypass valve opened
4/2/2011	1:08:08 PM	Helium MFC set to  0.000000
4/2/2011	1:08:08 PM	H2 MFC set to  0.000000
4/2/2011	1:08:08 PM	BCl3 MFC set to  0.000000
4/2/2011	1:08:08 PM	PHl3 MFC set to  0.000000
4/2/2011	1:08:08 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:08:08 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:08:08 PM	Tube furnace set to 0
4/2/2011	1:09:08 PM	H2 valve closed
4/2/2011	1:09:08 PM	BCl3 valve closed
4/2/2011	1:09:08 PM	PH3 valve closed
4/2/2011	1:09:08 PM	SiCl4 pre valve closed
4/2/2011	1:09:08 PM	SiCl4 post valve closed
4/2/2011	1:09:08 PM	Bubbler valve closed
4/2/2011	1:09:08 PM	Helium valve opened
4/2/2011	1:09:08 PM	Main Vac valve opened
4/2/2011	1:09:08 PM	Bypass valve opened
4/2/2011	1:09:08 PM	Helium MFC set to  100.000000
4/2/2011	1:09:08 PM	H2 MFC set to  0.000000
4/2/2011	1:09:08 PM	BCl3 MFC set to  0.000000
4/2/2011	1:09:08 PM	PHl3 MFC set to  0.000000
4/2/2011	1:09:08 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:09:08 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:09:09 PM	Tube furnace set to 0
4/2/2011	1:10:09 PM	Helium valve closed
4/2/2011	1:10:09 PM	H2 valve closed
4/2/2011	1:10:09 PM	BCl3 valve closed
4/2/2011	1:10:09 PM	PH3 valve closed
4/2/2011	1:10:09 PM	SiCl4 pre valve closed
4/2/2011	1:10:09 PM	SiCl4 post valve closed
4/2/2011	1:10:09 PM	Bubbler valve closed
4/2/2011	1:10:09 PM	Main Vac valve opened
4/2/2011	1:10:09 PM	Bypass valve opened
4/2/2011	1:10:09 PM	Helium MFC set to  0.000000
4/2/2011	1:10:09 PM	H2 MFC set to  0.000000
4/2/2011	1:10:09 PM	BCl3 MFC set to  0.000000
4/2/2011	1:10:09 PM	PHl3 MFC set to  0.000000
4/2/2011	1:10:09 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:10:09 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:10:09 PM	Tube furnace set to 0
4/2/2011	1:11:09 PM	H2 valve closed
4/2/2011	1:11:09 PM	BCl3 valve closed
4/2/2011	1:11:09 PM	PH3 valve closed
4/2/2011	1:11:09 PM	SiCl4 pre valve closed
4/2/2011	1:11:09 PM	SiCl4 post valve closed
4/2/2011	1:11:09 PM	Bubbler valve closed
4/2/2011	1:11:09 PM	Helium valve opened
4/2/2011	1:11:09 PM	Main Vac valve opened
4/2/2011	1:11:09 PM	Bypass valve opened
4/2/2011	1:11:09 PM	Helium MFC set to  100.000000
4/2/2011	1:11:09 PM	H2 MFC set to  0.000000
4/2/2011	1:11:09 PM	BCl3 MFC set to  0.000000
4/2/2011	1:11:09 PM	PHl3 MFC set to  0.000000
4/2/2011	1:11:09 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:11:09 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:11:09 PM	Tube furnace set to 0
4/2/2011	1:12:09 PM	Helium valve closed
4/2/2011	1:12:09 PM	H2 valve closed
4/2/2011	1:12:09 PM	BCl3 valve closed
4/2/2011	1:12:09 PM	PH3 valve closed
4/2/2011	1:12:09 PM	SiCl4 pre valve closed
4/2/2011	1:12:09 PM	SiCl4 post valve closed
4/2/2011	1:12:09 PM	Bubbler valve closed
4/2/2011	1:12:09 PM	Main Vac valve opened
4/2/2011	1:12:09 PM	Bypass valve opened
4/2/2011	1:12:09 PM	Helium MFC set to  0.000000
4/2/2011	1:12:09 PM	H2 MFC set to  0.000000
4/2/2011	1:12:09 PM	BCl3 MFC set to  0.000000
4/2/2011	1:12:09 PM	PHl3 MFC set to  0.000000
4/2/2011	1:12:09 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:12:09 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:12:09 PM	Tube furnace set to 0
4/2/2011	1:13:09 PM	H2 valve closed
4/2/2011	1:13:09 PM	BCl3 valve closed
4/2/2011	1:13:09 PM	PH3 valve closed
4/2/2011	1:13:09 PM	SiCl4 pre valve closed
4/2/2011	1:13:09 PM	SiCl4 post valve closed
4/2/2011	1:13:09 PM	Bubbler valve closed
4/2/2011	1:13:09 PM	Helium valve opened
4/2/2011	1:13:09 PM	Main Vac valve opened
4/2/2011	1:13:09 PM	Bypass valve opened
4/2/2011	1:13:09 PM	Helium MFC set to  100.000000
4/2/2011	1:13:09 PM	H2 MFC set to  0.000000
4/2/2011	1:13:09 PM	BCl3 MFC set to  0.000000
4/2/2011	1:13:09 PM	PHl3 MFC set to  0.000000
4/2/2011	1:13:09 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:13:09 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:13:09 PM	Tube furnace set to 0
4/2/2011	1:14:09 PM	Helium valve closed
4/2/2011	1:14:09 PM	H2 valve closed
4/2/2011	1:14:09 PM	BCl3 valve closed
4/2/2011	1:14:09 PM	PH3 valve closed
4/2/2011	1:14:09 PM	SiCl4 pre valve closed
4/2/2011	1:14:09 PM	SiCl4 post valve closed
4/2/2011	1:14:09 PM	Bubbler valve closed
4/2/2011	1:14:09 PM	Main Vac valve opened
4/2/2011	1:14:09 PM	Bypass valve opened
4/2/2011	1:14:09 PM	Helium MFC set to  0.000000
4/2/2011	1:14:09 PM	H2 MFC set to  0.000000
4/2/2011	1:14:09 PM	BCl3 MFC set to  0.000000
4/2/2011	1:14:09 PM	PHl3 MFC set to  0.000000
4/2/2011	1:14:09 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:14:09 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:14:09 PM	Tube furnace set to 0
4/2/2011	1:15:10 PM	H2 valve closed
4/2/2011	1:15:10 PM	BCl3 valve closed
4/2/2011	1:15:10 PM	PH3 valve closed
4/2/2011	1:15:10 PM	SiCl4 pre valve closed
4/2/2011	1:15:10 PM	SiCl4 post valve closed
4/2/2011	1:15:10 PM	Bubbler valve closed
4/2/2011	1:15:10 PM	Helium valve opened
4/2/2011	1:15:10 PM	Main Vac valve opened
4/2/2011	1:15:10 PM	Bypass valve opened
4/2/2011	1:15:10 PM	Helium MFC set to  100.000000
4/2/2011	1:15:10 PM	H2 MFC set to  0.000000
4/2/2011	1:15:10 PM	BCl3 MFC set to  0.000000
4/2/2011	1:15:10 PM	PHl3 MFC set to  0.000000
4/2/2011	1:15:10 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:15:10 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:15:10 PM	Tube furnace set to 0
4/2/2011	1:16:10 PM	Helium valve closed
4/2/2011	1:16:10 PM	H2 valve closed
4/2/2011	1:16:10 PM	BCl3 valve closed
4/2/2011	1:16:10 PM	PH3 valve closed
4/2/2011	1:16:10 PM	SiCl4 pre valve closed
4/2/2011	1:16:10 PM	SiCl4 post valve closed
4/2/2011	1:16:10 PM	Bubbler valve closed
4/2/2011	1:16:10 PM	Main Vac valve opened
4/2/2011	1:16:10 PM	Bypass valve opened
4/2/2011	1:16:10 PM	Helium MFC set to  0.000000
4/2/2011	1:16:10 PM	H2 MFC set to  0.000000
4/2/2011	1:16:10 PM	BCl3 MFC set to  0.000000
4/2/2011	1:16:10 PM	PHl3 MFC set to  0.000000
4/2/2011	1:16:10 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:16:10 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:16:10 PM	Tube furnace set to 0
4/2/2011	1:17:10 PM	H2 valve closed
4/2/2011	1:17:10 PM	BCl3 valve closed
4/2/2011	1:17:10 PM	PH3 valve closed
4/2/2011	1:17:10 PM	SiCl4 pre valve closed
4/2/2011	1:17:10 PM	SiCl4 post valve closed
4/2/2011	1:17:10 PM	Bubbler valve closed
4/2/2011	1:17:10 PM	Helium valve opened
4/2/2011	1:17:10 PM	Main Vac valve opened
4/2/2011	1:17:10 PM	Bypass valve opened
4/2/2011	1:17:10 PM	Helium MFC set to  100.000000
4/2/2011	1:17:10 PM	H2 MFC set to  0.000000
4/2/2011	1:17:10 PM	BCl3 MFC set to  0.000000
4/2/2011	1:17:10 PM	PHl3 MFC set to  0.000000
4/2/2011	1:17:10 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:17:10 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:17:10 PM	Tube furnace set to 0
4/2/2011	1:18:10 PM	Helium valve closed
4/2/2011	1:18:10 PM	H2 valve closed
4/2/2011	1:18:10 PM	BCl3 valve closed
4/2/2011	1:18:10 PM	PH3 valve closed
4/2/2011	1:18:10 PM	SiCl4 pre valve closed
4/2/2011	1:18:10 PM	SiCl4 post valve closed
4/2/2011	1:18:10 PM	Bubbler valve closed
4/2/2011	1:18:10 PM	Main Vac valve opened
4/2/2011	1:18:10 PM	Bypass valve opened
4/2/2011	1:18:10 PM	Helium MFC set to  0.000000
4/2/2011	1:18:10 PM	H2 MFC set to  0.000000
4/2/2011	1:18:10 PM	BCl3 MFC set to  0.000000
4/2/2011	1:18:10 PM	PHl3 MFC set to  0.000000
4/2/2011	1:18:10 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:18:10 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:18:10 PM	Tube furnace set to 0
4/2/2011	1:19:10 PM	H2 valve closed
4/2/2011	1:19:10 PM	BCl3 valve closed
4/2/2011	1:19:10 PM	PH3 valve closed
4/2/2011	1:19:10 PM	SiCl4 pre valve closed
4/2/2011	1:19:10 PM	SiCl4 post valve closed
4/2/2011	1:19:10 PM	Bubbler valve closed
4/2/2011	1:19:10 PM	Helium valve opened
4/2/2011	1:19:10 PM	Main Vac valve opened
4/2/2011	1:19:10 PM	Bypass valve opened
4/2/2011	1:19:10 PM	Helium MFC set to  100.000000
4/2/2011	1:19:10 PM	H2 MFC set to  0.000000
4/2/2011	1:19:10 PM	BCl3 MFC set to  0.000000
4/2/2011	1:19:10 PM	PHl3 MFC set to  0.000000
4/2/2011	1:19:10 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:19:10 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:19:10 PM	Tube furnace set to 0
4/2/2011	1:20:10 PM	Helium valve closed
4/2/2011	1:20:10 PM	H2 valve closed
4/2/2011	1:20:10 PM	BCl3 valve closed
4/2/2011	1:20:10 PM	PH3 valve closed
4/2/2011	1:20:11 PM	SiCl4 pre valve closed
4/2/2011	1:20:11 PM	SiCl4 post valve closed
4/2/2011	1:20:11 PM	Bubbler valve closed
4/2/2011	1:20:11 PM	Main Vac valve opened
4/2/2011	1:20:11 PM	Bypass valve opened
4/2/2011	1:20:11 PM	Helium MFC set to  0.000000
4/2/2011	1:20:11 PM	H2 MFC set to  0.000000
4/2/2011	1:20:11 PM	BCl3 MFC set to  0.000000
4/2/2011	1:20:11 PM	PHl3 MFC set to  0.000000
4/2/2011	1:20:11 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:20:11 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:20:11 PM	Tube furnace set to 0
4/2/2011	1:21:11 PM	H2 valve closed
4/2/2011	1:21:11 PM	BCl3 valve closed
4/2/2011	1:21:11 PM	PH3 valve closed
4/2/2011	1:21:11 PM	SiCl4 pre valve closed
4/2/2011	1:21:11 PM	SiCl4 post valve closed
4/2/2011	1:21:11 PM	Bubbler valve closed
4/2/2011	1:21:11 PM	Helium valve opened
4/2/2011	1:21:11 PM	Main Vac valve opened
4/2/2011	1:21:11 PM	Bypass valve opened
4/2/2011	1:21:11 PM	Helium MFC set to  100.000000
4/2/2011	1:21:11 PM	H2 MFC set to  0.000000
4/2/2011	1:21:11 PM	BCl3 MFC set to  0.000000
4/2/2011	1:21:11 PM	PHl3 MFC set to  0.000000
4/2/2011	1:21:11 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:21:11 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:21:11 PM	Tube furnace set to 0
4/2/2011	1:22:11 PM	Helium valve closed
4/2/2011	1:22:11 PM	H2 valve closed
4/2/2011	1:22:11 PM	BCl3 valve closed
4/2/2011	1:22:11 PM	PH3 valve closed
4/2/2011	1:22:11 PM	SiCl4 pre valve closed
4/2/2011	1:22:11 PM	SiCl4 post valve closed
4/2/2011	1:22:11 PM	Bubbler valve closed
4/2/2011	1:22:11 PM	Main Vac valve opened
4/2/2011	1:22:11 PM	Bypass valve opened
4/2/2011	1:22:11 PM	Helium MFC set to  0.000000
4/2/2011	1:22:11 PM	H2 MFC set to  0.000000
4/2/2011	1:22:11 PM	BCl3 MFC set to  0.000000
4/2/2011	1:22:11 PM	PHl3 MFC set to  0.000000
4/2/2011	1:22:11 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:22:11 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:22:11 PM	Tube furnace set to 0
4/2/2011	1:23:11 PM	H2 valve closed
4/2/2011	1:23:11 PM	BCl3 valve closed
4/2/2011	1:23:11 PM	PH3 valve closed
4/2/2011	1:23:11 PM	SiCl4 pre valve closed
4/2/2011	1:23:11 PM	SiCl4 post valve closed
4/2/2011	1:23:11 PM	Bubbler valve closed
4/2/2011	1:23:11 PM	Helium valve opened
4/2/2011	1:23:11 PM	Main Vac valve opened
4/2/2011	1:23:11 PM	Bypass valve opened
4/2/2011	1:23:11 PM	Helium MFC set to  100.000000
4/2/2011	1:23:11 PM	H2 MFC set to  0.000000
4/2/2011	1:23:11 PM	BCl3 MFC set to  0.000000
4/2/2011	1:23:11 PM	PHl3 MFC set to  0.000000
4/2/2011	1:23:11 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:23:11 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:23:11 PM	Tube furnace set to 0
4/2/2011	1:24:11 PM	Helium valve closed
4/2/2011	1:24:11 PM	H2 valve closed
4/2/2011	1:24:11 PM	BCl3 valve closed
4/2/2011	1:24:11 PM	PH3 valve closed
4/2/2011	1:24:11 PM	SiCl4 pre valve closed
4/2/2011	1:24:11 PM	SiCl4 post valve closed
4/2/2011	1:24:11 PM	Bubbler valve closed
4/2/2011	1:24:11 PM	Main Vac valve opened
4/2/2011	1:24:11 PM	Bypass valve opened
4/2/2011	1:24:11 PM	Helium MFC set to  0.000000
4/2/2011	1:24:11 PM	H2 MFC set to  0.000000
4/2/2011	1:24:11 PM	BCl3 MFC set to  0.000000
4/2/2011	1:24:11 PM	PHl3 MFC set to  0.000000
4/2/2011	1:24:11 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:24:11 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:24:11 PM	Tube furnace set to 0
4/2/2011	1:25:11 PM	H2 valve closed
4/2/2011	1:25:11 PM	BCl3 valve closed
4/2/2011	1:25:11 PM	PH3 valve closed
4/2/2011	1:25:11 PM	SiCl4 pre valve closed
4/2/2011	1:25:11 PM	SiCl4 post valve closed
4/2/2011	1:25:11 PM	Bubbler valve closed
4/2/2011	1:25:11 PM	Helium valve opened
4/2/2011	1:25:11 PM	Main Vac valve opened
4/2/2011	1:25:11 PM	Bypass valve opened
4/2/2011	1:25:11 PM	Helium MFC set to  100.000000
4/2/2011	1:25:11 PM	H2 MFC set to  0.000000
4/2/2011	1:25:12 PM	BCl3 MFC set to  0.000000
4/2/2011	1:25:12 PM	PHl3 MFC set to  0.000000
4/2/2011	1:25:12 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:25:12 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:25:12 PM	Tube furnace set to 0
4/2/2011	1:26:12 PM	Helium valve closed
4/2/2011	1:26:12 PM	H2 valve closed
4/2/2011	1:26:12 PM	BCl3 valve closed
4/2/2011	1:26:12 PM	PH3 valve closed
4/2/2011	1:26:12 PM	SiCl4 pre valve closed
4/2/2011	1:26:12 PM	SiCl4 post valve closed
4/2/2011	1:26:12 PM	Bubbler valve closed
4/2/2011	1:26:12 PM	Main Vac valve opened
4/2/2011	1:26:12 PM	Bypass valve opened
4/2/2011	1:26:12 PM	Helium MFC set to  0.000000
4/2/2011	1:26:12 PM	H2 MFC set to  0.000000
4/2/2011	1:26:12 PM	BCl3 MFC set to  0.000000
4/2/2011	1:26:12 PM	PHl3 MFC set to  0.000000
4/2/2011	1:26:12 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:26:12 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:26:12 PM	Tube furnace set to 0
4/2/2011	1:27:12 PM	H2 valve closed
4/2/2011	1:27:12 PM	BCl3 valve closed
4/2/2011	1:27:12 PM	PH3 valve closed
4/2/2011	1:27:12 PM	SiCl4 pre valve closed
4/2/2011	1:27:12 PM	SiCl4 post valve closed
4/2/2011	1:27:12 PM	Bubbler valve closed
4/2/2011	1:27:12 PM	Helium valve opened
4/2/2011	1:27:12 PM	Main Vac valve opened
4/2/2011	1:27:12 PM	Bypass valve opened
4/2/2011	1:27:12 PM	Helium MFC set to  100.000000
4/2/2011	1:27:12 PM	H2 MFC set to  0.000000
4/2/2011	1:27:12 PM	BCl3 MFC set to  0.000000
4/2/2011	1:27:12 PM	PHl3 MFC set to  0.000000
4/2/2011	1:27:12 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:27:12 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:27:12 PM	Tube furnace set to 0
4/2/2011	1:28:12 PM	Helium valve closed
4/2/2011	1:28:12 PM	H2 valve closed
4/2/2011	1:28:12 PM	BCl3 valve closed
4/2/2011	1:28:12 PM	PH3 valve closed
4/2/2011	1:28:12 PM	SiCl4 pre valve closed
4/2/2011	1:28:12 PM	SiCl4 post valve closed
4/2/2011	1:28:12 PM	Bubbler valve closed
4/2/2011	1:28:12 PM	Main Vac valve opened
4/2/2011	1:28:12 PM	Bypass valve opened
4/2/2011	1:28:12 PM	Helium MFC set to  0.000000
4/2/2011	1:28:12 PM	H2 MFC set to  0.000000
4/2/2011	1:28:12 PM	BCl3 MFC set to  0.000000
4/2/2011	1:28:12 PM	PHl3 MFC set to  0.000000
4/2/2011	1:28:12 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:28:12 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:28:12 PM	Tube furnace set to 0
4/2/2011	1:28:13 PM	Run finished at 1:28 PM
4/2/2011	1:28:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/2/2011	1:41:01 PM	Helium valve opened
4/2/2011	1:41:04 PM	Helium MFC set to  100.000000
4/2/2011	1:42:13 PM	Helium MFC set to  0.000000
4/2/2011	1:42:15 PM	Helium valve closed
4/2/2011	1:42:54 PM	Recipe started at 1:42 PM
4/2/2011	1:42:54 PM	Helium valve closed
4/2/2011	1:42:54 PM	BCl3 valve closed
4/2/2011	1:42:54 PM	PH3 valve closed
4/2/2011	1:42:54 PM	SiCl4 pre valve closed
4/2/2011	1:42:54 PM	SiCl4 post valve closed
4/2/2011	1:42:54 PM	Main Vac valve closed
4/2/2011	1:42:54 PM	Bypass valve closed
4/2/2011	1:42:54 PM	Bubbler valve closed
4/2/2011	1:42:54 PM	H2 valve opened
4/2/2011	1:42:54 PM	Helium MFC set to  0.000000
4/2/2011	1:42:54 PM	H2 MFC set to  500.000000
4/2/2011	1:42:54 PM	BCl3 MFC set to  0.000000
4/2/2011	1:42:54 PM	PHl3 MFC set to  0.000000
4/2/2011	1:42:54 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:42:54 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:42:54 PM	Tube furnace set to 0
4/2/2011	1:44:12 PM	Helium valve closed
4/2/2011	1:44:12 PM	BCl3 valve closed
4/2/2011	1:44:12 PM	PH3 valve closed
4/2/2011	1:44:12 PM	SiCl4 pre valve closed
4/2/2011	1:44:12 PM	SiCl4 post valve closed
4/2/2011	1:44:12 PM	Main Vac valve closed
4/2/2011	1:44:12 PM	Bypass valve closed
4/2/2011	1:44:12 PM	H2 valve opened
4/2/2011	1:44:12 PM	Bubbler valve opened
4/2/2011	1:44:12 PM	Helium MFC set to  0.000000
4/2/2011	1:44:12 PM	H2 MFC set to  500.000000
4/2/2011	1:44:12 PM	BCl3 MFC set to  0.000000
4/2/2011	1:44:12 PM	PHl3 MFC set to  0.000000
4/2/2011	1:44:12 PM	SiCl4 MFC set to  0.000000
4/2/2011	1:44:12 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	1:44:12 PM	Tube furnace set to 1035
4/2/2011	2:04:12 PM	Helium valve closed
4/2/2011	2:04:12 PM	BCl3 valve closed
4/2/2011	2:04:12 PM	PH3 valve closed
4/2/2011	2:04:12 PM	Main Vac valve closed
4/2/2011	2:04:12 PM	Bypass valve closed
4/2/2011	2:04:12 PM	H2 valve opened
4/2/2011	2:04:12 PM	SiCl4 pre valve opened
4/2/2011	2:04:12 PM	SiCl4 post valve opened
4/2/2011	2:04:12 PM	Bubbler valve opened
4/2/2011	2:04:12 PM	Helium MFC set to  0.000000
4/2/2011	2:04:12 PM	H2 MFC set to  500.000000
4/2/2011	2:04:12 PM	BCl3 MFC set to  0.000000
4/2/2011	2:04:12 PM	PHl3 MFC set to  0.000000
4/2/2011	2:04:12 PM	SiCl4 MFC set to  50.000000
4/2/2011	2:04:12 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	2:04:12 PM	Tube furnace set to 1035
4/2/2011	2:24:12 PM	H2 valve closed
4/2/2011	2:24:12 PM	BCl3 valve closed
4/2/2011	2:24:12 PM	PH3 valve closed
4/2/2011	2:24:12 PM	SiCl4 pre valve closed
4/2/2011	2:24:12 PM	SiCl4 post valve closed
4/2/2011	2:24:12 PM	Main Vac valve closed
4/2/2011	2:24:12 PM	Bypass valve closed
4/2/2011	2:24:12 PM	Helium valve opened
4/2/2011	2:24:12 PM	Bubbler valve opened
4/2/2011	2:24:12 PM	Helium MFC set to  500.000000
4/2/2011	2:24:12 PM	H2 MFC set to  0.000000
4/2/2011	2:24:12 PM	BCl3 MFC set to  0.000000
4/2/2011	2:24:12 PM	PHl3 MFC set to  0.000000
4/2/2011	2:24:12 PM	SiCl4 MFC set to  0.000000
4/2/2011	2:24:12 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	2:24:12 PM	Tube furnace set to 0
4/2/2011	2:44:12 PM	Helium valve closed
4/2/2011	2:44:12 PM	H2 valve closed
4/2/2011	2:44:12 PM	BCl3 valve closed
4/2/2011	2:44:12 PM	PH3 valve closed
4/2/2011	2:44:12 PM	SiCl4 pre valve closed
4/2/2011	2:44:12 PM	SiCl4 post valve closed
4/2/2011	2:44:12 PM	Main Vac valve closed
4/2/2011	2:44:12 PM	Bypass valve closed
4/2/2011	2:44:12 PM	Bubbler valve closed
4/2/2011	2:44:12 PM	Helium MFC set to  0.000000
4/2/2011	2:44:12 PM	H2 MFC set to  0.000000
4/2/2011	2:44:12 PM	BCl3 MFC set to  0.000000
4/2/2011	2:44:12 PM	PHl3 MFC set to  0.000000
4/2/2011	2:44:12 PM	SiCl4 MFC set to  0.000000
4/2/2011	2:44:12 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	2:44:13 PM	Tube furnace set to 0
4/2/2011	2:44:13 PM	Run finished at 2:44 PM
4/2/2011	3:33:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	3:33:45 PM	Recipe started at 3:33 PM
4/2/2011	3:33:45 PM	Helium valve closed
4/2/2011	3:33:45 PM	H2 valve closed
4/2/2011	3:33:45 PM	BCl3 valve closed
4/2/2011	3:33:45 PM	PH3 valve closed
4/2/2011	3:33:45 PM	SiCl4 pre valve closed
4/2/2011	3:33:45 PM	SiCl4 post valve closed
4/2/2011	3:33:45 PM	Main Vac valve closed
4/2/2011	3:33:45 PM	Bubbler valve closed
4/2/2011	3:33:45 PM	Bypass valve opened
4/2/2011	3:33:45 PM	Helium MFC set to  0.000000
4/2/2011	3:33:45 PM	H2 MFC set to  0.000000
4/2/2011	3:33:45 PM	BCl3 MFC set to  0.000000
4/2/2011	3:33:45 PM	PHl3 MFC set to  0.000000
4/2/2011	3:33:45 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:33:45 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:33:45 PM	Tube furnace set to 0
4/2/2011	3:34:17 PM	Helium valve closed
4/2/2011	3:34:17 PM	H2 valve closed
4/2/2011	3:34:17 PM	BCl3 valve closed
4/2/2011	3:34:17 PM	PH3 valve closed
4/2/2011	3:34:17 PM	SiCl4 pre valve closed
4/2/2011	3:34:17 PM	SiCl4 post valve closed
4/2/2011	3:34:17 PM	Bubbler valve closed
4/2/2011	3:34:17 PM	Main Vac valve opened
4/2/2011	3:34:17 PM	Bypass valve opened
4/2/2011	3:34:17 PM	Helium MFC set to  0.000000
4/2/2011	3:34:17 PM	H2 MFC set to  0.000000
4/2/2011	3:34:17 PM	BCl3 MFC set to  0.000000
4/2/2011	3:34:17 PM	PHl3 MFC set to  0.000000
4/2/2011	3:34:17 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:34:17 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:34:17 PM	Tube furnace set to 0
4/2/2011	3:34:17 PM	Run finished at 3:34 PM
4/2/2011	3:34:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	3:35:54 PM	Helium valve opened
4/2/2011	3:35:57 PM	Helium MFC set to  100.000000
4/2/2011	3:36:22 PM	Helium MFC set to  0.000000
4/2/2011	3:36:23 PM	Helium valve closed
4/2/2011	3:36:49 PM	Bypass valve closed
4/2/2011	3:36:50 PM	Main Vac valve closed
4/2/2011	3:37:00 PM	Main Vac valve opened
4/2/2011	3:37:01 PM	Bypass valve opened
4/2/2011	3:37:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/2/2011	3:37:32 PM	Recipe started at 3:37 PM
4/2/2011	3:37:32 PM	Helium valve closed
4/2/2011	3:37:32 PM	H2 valve closed
4/2/2011	3:37:32 PM	BCl3 valve closed
4/2/2011	3:37:32 PM	PH3 valve closed
4/2/2011	3:37:32 PM	SiCl4 pre valve closed
4/2/2011	3:37:32 PM	SiCl4 post valve closed
4/2/2011	3:37:32 PM	Main Vac valve closed
4/2/2011	3:37:32 PM	Bubbler valve closed
4/2/2011	3:37:32 PM	Bypass valve opened
4/2/2011	3:37:32 PM	Helium MFC set to  0.000000
4/2/2011	3:37:32 PM	H2 MFC set to  0.000000
4/2/2011	3:37:32 PM	BCl3 MFC set to  0.000000
4/2/2011	3:37:32 PM	PHl3 MFC set to  0.000000
4/2/2011	3:37:32 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:37:32 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:37:32 PM	Tube furnace set to 0
4/2/2011	3:37:32 PM	Helium valve closed
4/2/2011	3:37:32 PM	H2 valve closed
4/2/2011	3:37:32 PM	BCl3 valve closed
4/2/2011	3:37:32 PM	PH3 valve closed
4/2/2011	3:37:32 PM	SiCl4 pre valve closed
4/2/2011	3:37:32 PM	SiCl4 post valve closed
4/2/2011	3:37:32 PM	Bubbler valve closed
4/2/2011	3:37:32 PM	Main Vac valve opened
4/2/2011	3:37:32 PM	Bypass valve opened
4/2/2011	3:37:32 PM	Helium MFC set to  0.000000
4/2/2011	3:37:32 PM	H2 MFC set to  0.000000
4/2/2011	3:37:32 PM	BCl3 MFC set to  0.000000
4/2/2011	3:37:32 PM	PHl3 MFC set to  0.000000
4/2/2011	3:37:32 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:37:32 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:37:32 PM	Tube furnace set to 0
4/2/2011	3:38:32 PM	H2 valve closed
4/2/2011	3:38:32 PM	BCl3 valve closed
4/2/2011	3:38:32 PM	PH3 valve closed
4/2/2011	3:38:32 PM	SiCl4 pre valve closed
4/2/2011	3:38:32 PM	SiCl4 post valve closed
4/2/2011	3:38:32 PM	Bubbler valve closed
4/2/2011	3:38:32 PM	Helium valve opened
4/2/2011	3:38:32 PM	Main Vac valve opened
4/2/2011	3:38:32 PM	Bypass valve opened
4/2/2011	3:38:32 PM	Helium MFC set to  100.000000
4/2/2011	3:38:32 PM	H2 MFC set to  0.000000
4/2/2011	3:38:32 PM	BCl3 MFC set to  0.000000
4/2/2011	3:38:32 PM	PHl3 MFC set to  0.000000
4/2/2011	3:38:32 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:38:32 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:38:32 PM	Tube furnace set to 0
4/2/2011	3:39:32 PM	Helium valve closed
4/2/2011	3:39:32 PM	H2 valve closed
4/2/2011	3:39:32 PM	BCl3 valve closed
4/2/2011	3:39:32 PM	PH3 valve closed
4/2/2011	3:39:32 PM	SiCl4 pre valve closed
4/2/2011	3:39:32 PM	SiCl4 post valve closed
4/2/2011	3:39:32 PM	Bubbler valve closed
4/2/2011	3:39:32 PM	Main Vac valve opened
4/2/2011	3:39:32 PM	Bypass valve opened
4/2/2011	3:39:32 PM	Helium MFC set to  0.000000
4/2/2011	3:39:32 PM	H2 MFC set to  0.000000
4/2/2011	3:39:32 PM	BCl3 MFC set to  0.000000
4/2/2011	3:39:32 PM	PHl3 MFC set to  0.000000
4/2/2011	3:39:32 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:39:32 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:39:33 PM	Tube furnace set to 0
4/2/2011	3:40:33 PM	H2 valve closed
4/2/2011	3:40:33 PM	BCl3 valve closed
4/2/2011	3:40:33 PM	PH3 valve closed
4/2/2011	3:40:33 PM	SiCl4 pre valve closed
4/2/2011	3:40:33 PM	SiCl4 post valve closed
4/2/2011	3:40:33 PM	Bubbler valve closed
4/2/2011	3:40:33 PM	Helium valve opened
4/2/2011	3:40:33 PM	Main Vac valve opened
4/2/2011	3:40:33 PM	Bypass valve opened
4/2/2011	3:40:33 PM	Helium MFC set to  100.000000
4/2/2011	3:40:33 PM	H2 MFC set to  0.000000
4/2/2011	3:40:33 PM	BCl3 MFC set to  0.000000
4/2/2011	3:40:33 PM	PHl3 MFC set to  0.000000
4/2/2011	3:40:33 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:40:33 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:40:33 PM	Tube furnace set to 0
4/2/2011	3:41:33 PM	Helium valve closed
4/2/2011	3:41:33 PM	H2 valve closed
4/2/2011	3:41:33 PM	BCl3 valve closed
4/2/2011	3:41:33 PM	PH3 valve closed
4/2/2011	3:41:33 PM	SiCl4 pre valve closed
4/2/2011	3:41:33 PM	SiCl4 post valve closed
4/2/2011	3:41:33 PM	Bubbler valve closed
4/2/2011	3:41:33 PM	Main Vac valve opened
4/2/2011	3:41:33 PM	Bypass valve opened
4/2/2011	3:41:33 PM	Helium MFC set to  0.000000
4/2/2011	3:41:33 PM	H2 MFC set to  0.000000
4/2/2011	3:41:33 PM	BCl3 MFC set to  0.000000
4/2/2011	3:41:33 PM	PHl3 MFC set to  0.000000
4/2/2011	3:41:33 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:41:33 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:41:33 PM	Tube furnace set to 0
4/2/2011	3:42:33 PM	H2 valve closed
4/2/2011	3:42:33 PM	BCl3 valve closed
4/2/2011	3:42:33 PM	PH3 valve closed
4/2/2011	3:42:33 PM	SiCl4 pre valve closed
4/2/2011	3:42:33 PM	SiCl4 post valve closed
4/2/2011	3:42:33 PM	Bubbler valve closed
4/2/2011	3:42:33 PM	Helium valve opened
4/2/2011	3:42:33 PM	Main Vac valve opened
4/2/2011	3:42:33 PM	Bypass valve opened
4/2/2011	3:42:33 PM	Helium MFC set to  100.000000
4/2/2011	3:42:33 PM	H2 MFC set to  0.000000
4/2/2011	3:42:33 PM	BCl3 MFC set to  0.000000
4/2/2011	3:42:33 PM	PHl3 MFC set to  0.000000
4/2/2011	3:42:33 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:42:33 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:42:33 PM	Tube furnace set to 0
4/2/2011	3:43:33 PM	Helium valve closed
4/2/2011	3:43:33 PM	H2 valve closed
4/2/2011	3:43:33 PM	BCl3 valve closed
4/2/2011	3:43:33 PM	PH3 valve closed
4/2/2011	3:43:33 PM	SiCl4 pre valve closed
4/2/2011	3:43:33 PM	SiCl4 post valve closed
4/2/2011	3:43:33 PM	Bubbler valve closed
4/2/2011	3:43:33 PM	Main Vac valve opened
4/2/2011	3:43:33 PM	Bypass valve opened
4/2/2011	3:43:33 PM	Helium MFC set to  0.000000
4/2/2011	3:43:33 PM	H2 MFC set to  0.000000
4/2/2011	3:43:33 PM	BCl3 MFC set to  0.000000
4/2/2011	3:43:33 PM	PHl3 MFC set to  0.000000
4/2/2011	3:43:33 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:43:33 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:43:33 PM	Tube furnace set to 0
4/2/2011	3:44:33 PM	H2 valve closed
4/2/2011	3:44:33 PM	BCl3 valve closed
4/2/2011	3:44:33 PM	PH3 valve closed
4/2/2011	3:44:33 PM	SiCl4 pre valve closed
4/2/2011	3:44:33 PM	SiCl4 post valve closed
4/2/2011	3:44:33 PM	Bubbler valve closed
4/2/2011	3:44:33 PM	Helium valve opened
4/2/2011	3:44:33 PM	Main Vac valve opened
4/2/2011	3:44:33 PM	Bypass valve opened
4/2/2011	3:44:33 PM	Helium MFC set to  100.000000
4/2/2011	3:44:33 PM	H2 MFC set to  0.000000
4/2/2011	3:44:33 PM	BCl3 MFC set to  0.000000
4/2/2011	3:44:33 PM	PHl3 MFC set to  0.000000
4/2/2011	3:44:33 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:44:33 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:44:34 PM	Tube furnace set to 0
4/2/2011	3:45:34 PM	Helium valve closed
4/2/2011	3:45:34 PM	H2 valve closed
4/2/2011	3:45:34 PM	BCl3 valve closed
4/2/2011	3:45:34 PM	PH3 valve closed
4/2/2011	3:45:34 PM	SiCl4 pre valve closed
4/2/2011	3:45:34 PM	SiCl4 post valve closed
4/2/2011	3:45:34 PM	Bubbler valve closed
4/2/2011	3:45:34 PM	Main Vac valve opened
4/2/2011	3:45:34 PM	Bypass valve opened
4/2/2011	3:45:34 PM	Helium MFC set to  0.000000
4/2/2011	3:45:34 PM	H2 MFC set to  0.000000
4/2/2011	3:45:34 PM	BCl3 MFC set to  0.000000
4/2/2011	3:45:34 PM	PHl3 MFC set to  0.000000
4/2/2011	3:45:34 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:45:34 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:45:34 PM	Tube furnace set to 0
4/2/2011	3:46:34 PM	H2 valve closed
4/2/2011	3:46:34 PM	BCl3 valve closed
4/2/2011	3:46:34 PM	PH3 valve closed
4/2/2011	3:46:34 PM	SiCl4 pre valve closed
4/2/2011	3:46:34 PM	SiCl4 post valve closed
4/2/2011	3:46:34 PM	Bubbler valve closed
4/2/2011	3:46:34 PM	Helium valve opened
4/2/2011	3:46:34 PM	Main Vac valve opened
4/2/2011	3:46:34 PM	Bypass valve opened
4/2/2011	3:46:34 PM	Helium MFC set to  100.000000
4/2/2011	3:46:34 PM	H2 MFC set to  0.000000
4/2/2011	3:46:34 PM	BCl3 MFC set to  0.000000
4/2/2011	3:46:34 PM	PHl3 MFC set to  0.000000
4/2/2011	3:46:34 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:46:34 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:46:34 PM	Tube furnace set to 0
4/2/2011	3:47:34 PM	Helium valve closed
4/2/2011	3:47:34 PM	H2 valve closed
4/2/2011	3:47:34 PM	BCl3 valve closed
4/2/2011	3:47:34 PM	PH3 valve closed
4/2/2011	3:47:34 PM	SiCl4 pre valve closed
4/2/2011	3:47:34 PM	SiCl4 post valve closed
4/2/2011	3:47:34 PM	Bubbler valve closed
4/2/2011	3:47:34 PM	Main Vac valve opened
4/2/2011	3:47:34 PM	Bypass valve opened
4/2/2011	3:47:34 PM	Helium MFC set to  0.000000
4/2/2011	3:47:34 PM	H2 MFC set to  0.000000
4/2/2011	3:47:34 PM	BCl3 MFC set to  0.000000
4/2/2011	3:47:34 PM	PHl3 MFC set to  0.000000
4/2/2011	3:47:34 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:47:34 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:47:34 PM	Tube furnace set to 0
4/2/2011	3:48:34 PM	H2 valve closed
4/2/2011	3:48:34 PM	BCl3 valve closed
4/2/2011	3:48:34 PM	PH3 valve closed
4/2/2011	3:48:34 PM	SiCl4 pre valve closed
4/2/2011	3:48:34 PM	SiCl4 post valve closed
4/2/2011	3:48:34 PM	Bubbler valve closed
4/2/2011	3:48:34 PM	Helium valve opened
4/2/2011	3:48:34 PM	Main Vac valve opened
4/2/2011	3:48:34 PM	Bypass valve opened
4/2/2011	3:48:34 PM	Helium MFC set to  100.000000
4/2/2011	3:48:34 PM	H2 MFC set to  0.000000
4/2/2011	3:48:34 PM	BCl3 MFC set to  0.000000
4/2/2011	3:48:34 PM	PHl3 MFC set to  0.000000
4/2/2011	3:48:34 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:48:34 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:48:34 PM	Tube furnace set to 0
4/2/2011	3:49:34 PM	Helium valve closed
4/2/2011	3:49:34 PM	H2 valve closed
4/2/2011	3:49:34 PM	BCl3 valve closed
4/2/2011	3:49:34 PM	PH3 valve closed
4/2/2011	3:49:34 PM	SiCl4 pre valve closed
4/2/2011	3:49:34 PM	SiCl4 post valve closed
4/2/2011	3:49:34 PM	Bubbler valve closed
4/2/2011	3:49:34 PM	Main Vac valve opened
4/2/2011	3:49:34 PM	Bypass valve opened
4/2/2011	3:49:34 PM	Helium MFC set to  0.000000
4/2/2011	3:49:34 PM	H2 MFC set to  0.000000
4/2/2011	3:49:34 PM	BCl3 MFC set to  0.000000
4/2/2011	3:49:34 PM	PHl3 MFC set to  0.000000
4/2/2011	3:49:34 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:49:34 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:49:35 PM	Tube furnace set to 0
4/2/2011	3:50:35 PM	H2 valve closed
4/2/2011	3:50:35 PM	BCl3 valve closed
4/2/2011	3:50:35 PM	PH3 valve closed
4/2/2011	3:50:35 PM	SiCl4 pre valve closed
4/2/2011	3:50:35 PM	SiCl4 post valve closed
4/2/2011	3:50:35 PM	Bubbler valve closed
4/2/2011	3:50:35 PM	Helium valve opened
4/2/2011	3:50:35 PM	Main Vac valve opened
4/2/2011	3:50:35 PM	Bypass valve opened
4/2/2011	3:50:35 PM	Helium MFC set to  100.000000
4/2/2011	3:50:35 PM	H2 MFC set to  0.000000
4/2/2011	3:50:35 PM	BCl3 MFC set to  0.000000
4/2/2011	3:50:35 PM	PHl3 MFC set to  0.000000
4/2/2011	3:50:35 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:50:35 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:50:35 PM	Tube furnace set to 0
4/2/2011	3:51:35 PM	Helium valve closed
4/2/2011	3:51:35 PM	H2 valve closed
4/2/2011	3:51:35 PM	BCl3 valve closed
4/2/2011	3:51:35 PM	PH3 valve closed
4/2/2011	3:51:35 PM	SiCl4 pre valve closed
4/2/2011	3:51:35 PM	SiCl4 post valve closed
4/2/2011	3:51:35 PM	Bubbler valve closed
4/2/2011	3:51:35 PM	Main Vac valve opened
4/2/2011	3:51:35 PM	Bypass valve opened
4/2/2011	3:51:35 PM	Helium MFC set to  0.000000
4/2/2011	3:51:35 PM	H2 MFC set to  0.000000
4/2/2011	3:51:35 PM	BCl3 MFC set to  0.000000
4/2/2011	3:51:35 PM	PHl3 MFC set to  0.000000
4/2/2011	3:51:35 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:51:35 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:51:35 PM	Tube furnace set to 0
4/2/2011	3:52:35 PM	H2 valve closed
4/2/2011	3:52:35 PM	BCl3 valve closed
4/2/2011	3:52:35 PM	PH3 valve closed
4/2/2011	3:52:35 PM	SiCl4 pre valve closed
4/2/2011	3:52:35 PM	SiCl4 post valve closed
4/2/2011	3:52:35 PM	Bubbler valve closed
4/2/2011	3:52:35 PM	Helium valve opened
4/2/2011	3:52:35 PM	Main Vac valve opened
4/2/2011	3:52:35 PM	Bypass valve opened
4/2/2011	3:52:35 PM	Helium MFC set to  100.000000
4/2/2011	3:52:35 PM	H2 MFC set to  0.000000
4/2/2011	3:52:35 PM	BCl3 MFC set to  0.000000
4/2/2011	3:52:35 PM	PHl3 MFC set to  0.000000
4/2/2011	3:52:35 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:52:35 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:52:35 PM	Tube furnace set to 0
4/2/2011	3:53:35 PM	Helium valve closed
4/2/2011	3:53:35 PM	H2 valve closed
4/2/2011	3:53:35 PM	BCl3 valve closed
4/2/2011	3:53:35 PM	PH3 valve closed
4/2/2011	3:53:35 PM	SiCl4 pre valve closed
4/2/2011	3:53:35 PM	SiCl4 post valve closed
4/2/2011	3:53:35 PM	Bubbler valve closed
4/2/2011	3:53:35 PM	Main Vac valve opened
4/2/2011	3:53:35 PM	Bypass valve opened
4/2/2011	3:53:35 PM	Helium MFC set to  0.000000
4/2/2011	3:53:35 PM	H2 MFC set to  0.000000
4/2/2011	3:53:35 PM	BCl3 MFC set to  0.000000
4/2/2011	3:53:35 PM	PHl3 MFC set to  0.000000
4/2/2011	3:53:35 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:53:35 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:53:35 PM	Tube furnace set to 0
4/2/2011	3:54:35 PM	H2 valve closed
4/2/2011	3:54:35 PM	BCl3 valve closed
4/2/2011	3:54:35 PM	PH3 valve closed
4/2/2011	3:54:35 PM	SiCl4 pre valve closed
4/2/2011	3:54:35 PM	SiCl4 post valve closed
4/2/2011	3:54:35 PM	Bubbler valve closed
4/2/2011	3:54:35 PM	Helium valve opened
4/2/2011	3:54:35 PM	Main Vac valve opened
4/2/2011	3:54:35 PM	Bypass valve opened
4/2/2011	3:54:35 PM	Helium MFC set to  100.000000
4/2/2011	3:54:35 PM	H2 MFC set to  0.000000
4/2/2011	3:54:35 PM	BCl3 MFC set to  0.000000
4/2/2011	3:54:35 PM	PHl3 MFC set to  0.000000
4/2/2011	3:54:35 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:54:35 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:54:36 PM	Tube furnace set to 0
4/2/2011	3:55:36 PM	Helium valve closed
4/2/2011	3:55:36 PM	H2 valve closed
4/2/2011	3:55:36 PM	BCl3 valve closed
4/2/2011	3:55:36 PM	PH3 valve closed
4/2/2011	3:55:36 PM	SiCl4 pre valve closed
4/2/2011	3:55:36 PM	SiCl4 post valve closed
4/2/2011	3:55:36 PM	Bubbler valve closed
4/2/2011	3:55:36 PM	Main Vac valve opened
4/2/2011	3:55:36 PM	Bypass valve opened
4/2/2011	3:55:36 PM	Helium MFC set to  0.000000
4/2/2011	3:55:36 PM	H2 MFC set to  0.000000
4/2/2011	3:55:36 PM	BCl3 MFC set to  0.000000
4/2/2011	3:55:36 PM	PHl3 MFC set to  0.000000
4/2/2011	3:55:36 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:55:36 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:55:36 PM	Tube furnace set to 0
4/2/2011	3:56:36 PM	H2 valve closed
4/2/2011	3:56:36 PM	BCl3 valve closed
4/2/2011	3:56:36 PM	PH3 valve closed
4/2/2011	3:56:36 PM	SiCl4 pre valve closed
4/2/2011	3:56:36 PM	SiCl4 post valve closed
4/2/2011	3:56:36 PM	Bubbler valve closed
4/2/2011	3:56:36 PM	Helium valve opened
4/2/2011	3:56:36 PM	Main Vac valve opened
4/2/2011	3:56:36 PM	Bypass valve opened
4/2/2011	3:56:36 PM	Helium MFC set to  100.000000
4/2/2011	3:56:36 PM	H2 MFC set to  0.000000
4/2/2011	3:56:36 PM	BCl3 MFC set to  0.000000
4/2/2011	3:56:36 PM	PHl3 MFC set to  0.000000
4/2/2011	3:56:36 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:56:36 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:56:36 PM	Tube furnace set to 0
4/2/2011	3:57:29 PM	Run aborted at 3:57 PM
4/2/2011	3:57:29 PM	Helium valve closed
4/2/2011	3:57:29 PM	H2 valve closed
4/2/2011	3:57:29 PM	BCl3 valve closed
4/2/2011	3:57:29 PM	PH3 valve closed
4/2/2011	3:57:29 PM	SiCl4 pre valve closed
4/2/2011	3:57:29 PM	SiCl4 post valve closed
4/2/2011	3:57:29 PM	Bypass valve closed
4/2/2011	3:57:29 PM	Main Vac valve closed
4/2/2011	3:57:29 PM	Bubbler valve closed
4/2/2011	3:57:29 PM	Helium MFC set to  0.000000
4/2/2011	3:57:29 PM	H2 MFC set to  0.000000
4/2/2011	3:57:29 PM	BCl3 MFC set to  0.000000
4/2/2011	3:57:29 PM	PHl3 MFC set to  0.000000
4/2/2011	3:57:29 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:57:30 PM	Tube furnace set to 0
4/2/2011	3:57:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/2/2011	3:57:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	3:57:32 PM	Recipe started at 3:57 PM
4/2/2011	3:57:32 PM	Helium valve closed
4/2/2011	3:57:32 PM	H2 valve closed
4/2/2011	3:57:32 PM	BCl3 valve closed
4/2/2011	3:57:32 PM	PH3 valve closed
4/2/2011	3:57:32 PM	SiCl4 pre valve closed
4/2/2011	3:57:32 PM	SiCl4 post valve closed
4/2/2011	3:57:32 PM	Main Vac valve closed
4/2/2011	3:57:32 PM	Bubbler valve closed
4/2/2011	3:57:32 PM	Bypass valve opened
4/2/2011	3:57:32 PM	Helium MFC set to  0.000000
4/2/2011	3:57:32 PM	H2 MFC set to  0.000000
4/2/2011	3:57:32 PM	BCl3 MFC set to  0.000000
4/2/2011	3:57:32 PM	PHl3 MFC set to  0.000000
4/2/2011	3:57:32 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:57:32 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:57:32 PM	Tube furnace set to 0
4/2/2011	3:57:32 PM	Helium valve closed
4/2/2011	3:57:33 PM	H2 valve closed
4/2/2011	3:57:33 PM	BCl3 valve closed
4/2/2011	3:57:33 PM	PH3 valve closed
4/2/2011	3:57:33 PM	SiCl4 pre valve closed
4/2/2011	3:57:33 PM	SiCl4 post valve closed
4/2/2011	3:57:33 PM	Bubbler valve closed
4/2/2011	3:57:33 PM	Main Vac valve opened
4/2/2011	3:57:33 PM	Bypass valve opened
4/2/2011	3:57:33 PM	Helium MFC set to  0.000000
4/2/2011	3:57:33 PM	H2 MFC set to  0.000000
4/2/2011	3:57:33 PM	BCl3 MFC set to  0.000000
4/2/2011	3:57:33 PM	PHl3 MFC set to  0.000000
4/2/2011	3:57:33 PM	SiCl4 MFC set to  0.000000
4/2/2011	3:57:33 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	3:57:33 PM	Tube furnace set to 0
4/2/2011	3:57:33 PM	Run finished at 3:57 PM
4/2/2011	3:57:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	3:58:53 PM	Bypass valve closed
4/2/2011	3:58:53 PM	Main Vac valve closed
4/2/2011	3:59:04 PM	Main Vac valve opened
4/2/2011	3:59:05 PM	Bypass valve opened
4/2/2011	3:59:09 PM	Helium valve opened
4/2/2011	3:59:11 PM	Helium MFC set to  100.000000
4/2/2011	3:59:45 PM	Helium MFC set to  0.000000
4/2/2011	3:59:47 PM	Helium valve closed
4/2/2011	4:00:40 PM	Recipe started at 4:00 PM
4/2/2011	4:00:40 PM	Helium valve closed
4/2/2011	4:00:40 PM	BCl3 valve closed
4/2/2011	4:00:40 PM	PH3 valve closed
4/2/2011	4:00:40 PM	SiCl4 pre valve closed
4/2/2011	4:00:40 PM	SiCl4 post valve closed
4/2/2011	4:00:40 PM	Main Vac valve closed
4/2/2011	4:00:40 PM	Bypass valve closed
4/2/2011	4:00:40 PM	Bubbler valve closed
4/2/2011	4:00:40 PM	H2 valve opened
4/2/2011	4:00:40 PM	Helium MFC set to  0.000000
4/2/2011	4:00:40 PM	H2 MFC set to  500.000000
4/2/2011	4:00:40 PM	BCl3 MFC set to  0.000000
4/2/2011	4:00:40 PM	PHl3 MFC set to  0.000000
4/2/2011	4:00:40 PM	SiCl4 MFC set to  0.000000
4/2/2011	4:00:41 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	4:00:41 PM	Tube furnace set to 0
4/2/2011	4:01:58 PM	Helium valve closed
4/2/2011	4:01:58 PM	BCl3 valve closed
4/2/2011	4:01:58 PM	PH3 valve closed
4/2/2011	4:01:58 PM	SiCl4 pre valve closed
4/2/2011	4:01:58 PM	SiCl4 post valve closed
4/2/2011	4:01:58 PM	Main Vac valve closed
4/2/2011	4:01:58 PM	Bypass valve closed
4/2/2011	4:01:58 PM	H2 valve opened
4/2/2011	4:01:58 PM	Bubbler valve opened
4/2/2011	4:01:58 PM	Helium MFC set to  0.000000
4/2/2011	4:01:58 PM	H2 MFC set to  500.000000
4/2/2011	4:01:58 PM	BCl3 MFC set to  0.000000
4/2/2011	4:01:58 PM	PHl3 MFC set to  0.000000
4/2/2011	4:01:58 PM	SiCl4 MFC set to  0.000000
4/2/2011	4:01:58 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	4:01:59 PM	Tube furnace set to 1035
4/2/2011	4:21:59 PM	Helium valve closed
4/2/2011	4:21:59 PM	PH3 valve closed
4/2/2011	4:21:59 PM	Main Vac valve closed
4/2/2011	4:21:59 PM	Bypass valve closed
4/2/2011	4:21:59 PM	H2 valve opened
4/2/2011	4:21:59 PM	BCl3 valve opened
4/2/2011	4:21:59 PM	SiCl4 pre valve opened
4/2/2011	4:21:59 PM	SiCl4 post valve opened
4/2/2011	4:21:59 PM	Bubbler valve opened
4/2/2011	4:21:59 PM	Helium MFC set to  0.000000
4/2/2011	4:21:59 PM	H2 MFC set to  500.000000
4/2/2011	4:21:59 PM	BCl3 MFC set to  3.000000
4/2/2011	4:21:59 PM	PHl3 MFC set to  0.000000
4/2/2011	4:21:59 PM	SiCl4 MFC set to  50.000000
4/2/2011	4:21:59 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	4:21:59 PM	Tube furnace set to 1035
4/2/2011	4:41:59 PM	H2 valve closed
4/2/2011	4:41:59 PM	BCl3 valve closed
4/2/2011	4:41:59 PM	PH3 valve closed
4/2/2011	4:41:59 PM	SiCl4 pre valve closed
4/2/2011	4:41:59 PM	SiCl4 post valve closed
4/2/2011	4:41:59 PM	Main Vac valve closed
4/2/2011	4:41:59 PM	Bypass valve closed
4/2/2011	4:41:59 PM	Helium valve opened
4/2/2011	4:41:59 PM	Bubbler valve opened
4/2/2011	4:41:59 PM	Helium MFC set to  500.000000
4/2/2011	4:41:59 PM	H2 MFC set to  0.000000
4/2/2011	4:41:59 PM	BCl3 MFC set to  0.000000
4/2/2011	4:41:59 PM	PHl3 MFC set to  0.000000
4/2/2011	4:41:59 PM	SiCl4 MFC set to  0.000000
4/2/2011	4:41:59 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	4:41:59 PM	Tube furnace set to 0
4/2/2011	5:01:59 PM	Helium valve closed
4/2/2011	5:01:59 PM	H2 valve closed
4/2/2011	5:01:59 PM	BCl3 valve closed
4/2/2011	5:01:59 PM	PH3 valve closed
4/2/2011	5:01:59 PM	SiCl4 pre valve closed
4/2/2011	5:01:59 PM	SiCl4 post valve closed
4/2/2011	5:01:59 PM	Main Vac valve closed
4/2/2011	5:01:59 PM	Bypass valve closed
4/2/2011	5:01:59 PM	Bubbler valve closed
4/2/2011	5:01:59 PM	Helium MFC set to  0.000000
4/2/2011	5:01:59 PM	H2 MFC set to  0.000000
4/2/2011	5:01:59 PM	BCl3 MFC set to  0.000000
4/2/2011	5:01:59 PM	PHl3 MFC set to  0.000000
4/2/2011	5:01:59 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:01:59 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:01:59 PM	Tube furnace set to 0
4/2/2011	5:01:59 PM	Run finished at 5:01 PM
4/2/2011	5:09:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2011	5:09:33 PM	Recipe started at 5:09 PM
4/2/2011	5:09:34 PM	H2 valve closed
4/2/2011	5:09:34 PM	BCl3 valve closed
4/2/2011	5:09:34 PM	PH3 valve closed
4/2/2011	5:09:34 PM	SiCl4 pre valve closed
4/2/2011	5:09:34 PM	SiCl4 post valve closed
4/2/2011	5:09:34 PM	Main Vac valve closed
4/2/2011	5:09:34 PM	Bypass valve closed
4/2/2011	5:09:34 PM	Bubbler valve closed
4/2/2011	5:09:34 PM	Helium valve opened
4/2/2011	5:09:34 PM	Helium MFC set to  500.000000
4/2/2011	5:09:34 PM	H2 MFC set to  0.000000
4/2/2011	5:09:34 PM	BCl3 MFC set to  0.000000
4/2/2011	5:09:34 PM	PHl3 MFC set to  0.000000
4/2/2011	5:09:34 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:09:34 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:09:34 PM	Tube furnace set to 0
4/2/2011	5:09:36 PM	Helium valve closed
4/2/2011	5:09:36 PM	H2 valve closed
4/2/2011	5:09:36 PM	BCl3 valve closed
4/2/2011	5:09:36 PM	PH3 valve closed
4/2/2011	5:09:36 PM	SiCl4 pre valve closed
4/2/2011	5:09:36 PM	SiCl4 post valve closed
4/2/2011	5:09:36 PM	Main Vac valve closed
4/2/2011	5:09:36 PM	Bypass valve closed
4/2/2011	5:09:36 PM	Bubbler valve closed
4/2/2011	5:09:36 PM	Helium MFC set to  0.000000
4/2/2011	5:09:36 PM	H2 MFC set to  0.000000
4/2/2011	5:09:36 PM	BCl3 MFC set to  0.000000
4/2/2011	5:09:36 PM	PHl3 MFC set to  0.000000
4/2/2011	5:09:36 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:09:36 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:09:36 PM	Tube furnace set to 0
4/2/2011	5:09:37 PM	Run finished at 5:09 PM
4/2/2011	5:09:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2011	5:12:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	5:12:54 PM	Recipe started at 5:12 PM
4/2/2011	5:12:54 PM	Helium valve closed
4/2/2011	5:12:54 PM	H2 valve closed
4/2/2011	5:12:54 PM	BCl3 valve closed
4/2/2011	5:12:54 PM	PH3 valve closed
4/2/2011	5:12:54 PM	SiCl4 pre valve closed
4/2/2011	5:12:54 PM	SiCl4 post valve closed
4/2/2011	5:12:54 PM	Main Vac valve closed
4/2/2011	5:12:54 PM	Bubbler valve closed
4/2/2011	5:12:54 PM	Bypass valve opened
4/2/2011	5:12:54 PM	Helium MFC set to  0.000000
4/2/2011	5:12:54 PM	H2 MFC set to  0.000000
4/2/2011	5:12:54 PM	BCl3 MFC set to  0.000000
4/2/2011	5:12:54 PM	PHl3 MFC set to  0.000000
4/2/2011	5:12:54 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:12:54 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:12:54 PM	Tube furnace set to 0
4/2/2011	5:13:25 PM	Helium valve closed
4/2/2011	5:13:25 PM	H2 valve closed
4/2/2011	5:13:25 PM	BCl3 valve closed
4/2/2011	5:13:25 PM	PH3 valve closed
4/2/2011	5:13:25 PM	SiCl4 pre valve closed
4/2/2011	5:13:25 PM	SiCl4 post valve closed
4/2/2011	5:13:25 PM	Bubbler valve closed
4/2/2011	5:13:25 PM	Main Vac valve opened
4/2/2011	5:13:25 PM	Bypass valve opened
4/2/2011	5:13:25 PM	Helium MFC set to  0.000000
4/2/2011	5:13:25 PM	H2 MFC set to  0.000000
4/2/2011	5:13:25 PM	BCl3 MFC set to  0.000000
4/2/2011	5:13:25 PM	PHl3 MFC set to  0.000000
4/2/2011	5:13:25 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:13:25 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:13:26 PM	Tube furnace set to 0
4/2/2011	5:13:26 PM	Run finished at 5:13 PM
4/2/2011	5:13:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	5:16:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/2/2011	5:17:00 PM	Recipe started at 5:16 PM
4/2/2011	5:17:00 PM	Helium valve closed
4/2/2011	5:17:00 PM	H2 valve closed
4/2/2011	5:17:00 PM	BCl3 valve closed
4/2/2011	5:17:00 PM	PH3 valve closed
4/2/2011	5:17:00 PM	SiCl4 pre valve closed
4/2/2011	5:17:00 PM	SiCl4 post valve closed
4/2/2011	5:17:00 PM	Main Vac valve closed
4/2/2011	5:17:00 PM	Bubbler valve closed
4/2/2011	5:17:00 PM	Bypass valve opened
4/2/2011	5:17:00 PM	Helium MFC set to  0.000000
4/2/2011	5:17:00 PM	H2 MFC set to  0.000000
4/2/2011	5:17:00 PM	BCl3 MFC set to  0.000000
4/2/2011	5:17:00 PM	PHl3 MFC set to  0.000000
4/2/2011	5:17:00 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:17:00 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:17:00 PM	Tube furnace set to 0
4/2/2011	5:17:01 PM	Helium valve closed
4/2/2011	5:17:01 PM	H2 valve closed
4/2/2011	5:17:01 PM	BCl3 valve closed
4/2/2011	5:17:01 PM	PH3 valve closed
4/2/2011	5:17:01 PM	SiCl4 pre valve closed
4/2/2011	5:17:01 PM	SiCl4 post valve closed
4/2/2011	5:17:01 PM	Bubbler valve closed
4/2/2011	5:17:01 PM	Main Vac valve opened
4/2/2011	5:17:01 PM	Bypass valve opened
4/2/2011	5:17:01 PM	Helium MFC set to  0.000000
4/2/2011	5:17:01 PM	H2 MFC set to  0.000000
4/2/2011	5:17:01 PM	BCl3 MFC set to  0.000000
4/2/2011	5:17:01 PM	PHl3 MFC set to  0.000000
4/2/2011	5:17:01 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:17:01 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:17:01 PM	Tube furnace set to 0
4/2/2011	5:18:01 PM	H2 valve closed
4/2/2011	5:18:01 PM	BCl3 valve closed
4/2/2011	5:18:01 PM	PH3 valve closed
4/2/2011	5:18:01 PM	SiCl4 pre valve closed
4/2/2011	5:18:01 PM	SiCl4 post valve closed
4/2/2011	5:18:01 PM	Bubbler valve closed
4/2/2011	5:18:01 PM	Helium valve opened
4/2/2011	5:18:01 PM	Main Vac valve opened
4/2/2011	5:18:01 PM	Bypass valve opened
4/2/2011	5:18:01 PM	Helium MFC set to  100.000000
4/2/2011	5:18:01 PM	H2 MFC set to  0.000000
4/2/2011	5:18:01 PM	BCl3 MFC set to  0.000000
4/2/2011	5:18:01 PM	PHl3 MFC set to  0.000000
4/2/2011	5:18:01 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:18:01 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:18:01 PM	Tube furnace set to 0
4/2/2011	5:19:01 PM	Helium valve closed
4/2/2011	5:19:01 PM	H2 valve closed
4/2/2011	5:19:01 PM	BCl3 valve closed
4/2/2011	5:19:01 PM	PH3 valve closed
4/2/2011	5:19:01 PM	SiCl4 pre valve closed
4/2/2011	5:19:01 PM	SiCl4 post valve closed
4/2/2011	5:19:01 PM	Bubbler valve closed
4/2/2011	5:19:01 PM	Main Vac valve opened
4/2/2011	5:19:01 PM	Bypass valve opened
4/2/2011	5:19:01 PM	Helium MFC set to  0.000000
4/2/2011	5:19:01 PM	H2 MFC set to  0.000000
4/2/2011	5:19:01 PM	BCl3 MFC set to  0.000000
4/2/2011	5:19:01 PM	PHl3 MFC set to  0.000000
4/2/2011	5:19:01 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:19:01 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:19:01 PM	Tube furnace set to 0
4/2/2011	5:20:01 PM	H2 valve closed
4/2/2011	5:20:01 PM	BCl3 valve closed
4/2/2011	5:20:01 PM	PH3 valve closed
4/2/2011	5:20:01 PM	SiCl4 pre valve closed
4/2/2011	5:20:01 PM	SiCl4 post valve closed
4/2/2011	5:20:01 PM	Bubbler valve closed
4/2/2011	5:20:01 PM	Helium valve opened
4/2/2011	5:20:01 PM	Main Vac valve opened
4/2/2011	5:20:01 PM	Bypass valve opened
4/2/2011	5:20:01 PM	Helium MFC set to  100.000000
4/2/2011	5:20:01 PM	H2 MFC set to  0.000000
4/2/2011	5:20:01 PM	BCl3 MFC set to  0.000000
4/2/2011	5:20:01 PM	PHl3 MFC set to  0.000000
4/2/2011	5:20:01 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:20:01 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:20:01 PM	Tube furnace set to 0
4/2/2011	5:21:01 PM	Helium valve closed
4/2/2011	5:21:01 PM	H2 valve closed
4/2/2011	5:21:01 PM	BCl3 valve closed
4/2/2011	5:21:01 PM	PH3 valve closed
4/2/2011	5:21:01 PM	SiCl4 pre valve closed
4/2/2011	5:21:01 PM	SiCl4 post valve closed
4/2/2011	5:21:01 PM	Bubbler valve closed
4/2/2011	5:21:01 PM	Main Vac valve opened
4/2/2011	5:21:01 PM	Bypass valve opened
4/2/2011	5:21:01 PM	Helium MFC set to  0.000000
4/2/2011	5:21:01 PM	H2 MFC set to  0.000000
4/2/2011	5:21:01 PM	BCl3 MFC set to  0.000000
4/2/2011	5:21:01 PM	PHl3 MFC set to  0.000000
4/2/2011	5:21:01 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:21:01 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:21:02 PM	Tube furnace set to 0
4/2/2011	5:22:02 PM	H2 valve closed
4/2/2011	5:22:02 PM	BCl3 valve closed
4/2/2011	5:22:02 PM	PH3 valve closed
4/2/2011	5:22:02 PM	SiCl4 pre valve closed
4/2/2011	5:22:02 PM	SiCl4 post valve closed
4/2/2011	5:22:02 PM	Bubbler valve closed
4/2/2011	5:22:02 PM	Helium valve opened
4/2/2011	5:22:02 PM	Main Vac valve opened
4/2/2011	5:22:02 PM	Bypass valve opened
4/2/2011	5:22:02 PM	Helium MFC set to  100.000000
4/2/2011	5:22:02 PM	H2 MFC set to  0.000000
4/2/2011	5:22:02 PM	BCl3 MFC set to  0.000000
4/2/2011	5:22:02 PM	PHl3 MFC set to  0.000000
4/2/2011	5:22:02 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:22:02 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:22:02 PM	Tube furnace set to 0
4/2/2011	5:23:02 PM	Helium valve closed
4/2/2011	5:23:02 PM	H2 valve closed
4/2/2011	5:23:02 PM	BCl3 valve closed
4/2/2011	5:23:02 PM	PH3 valve closed
4/2/2011	5:23:02 PM	SiCl4 pre valve closed
4/2/2011	5:23:02 PM	SiCl4 post valve closed
4/2/2011	5:23:02 PM	Bubbler valve closed
4/2/2011	5:23:02 PM	Main Vac valve opened
4/2/2011	5:23:02 PM	Bypass valve opened
4/2/2011	5:23:02 PM	Helium MFC set to  0.000000
4/2/2011	5:23:02 PM	H2 MFC set to  0.000000
4/2/2011	5:23:02 PM	BCl3 MFC set to  0.000000
4/2/2011	5:23:02 PM	PHl3 MFC set to  0.000000
4/2/2011	5:23:02 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:23:02 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:23:02 PM	Tube furnace set to 0
4/2/2011	5:24:02 PM	H2 valve closed
4/2/2011	5:24:02 PM	BCl3 valve closed
4/2/2011	5:24:02 PM	PH3 valve closed
4/2/2011	5:24:02 PM	SiCl4 pre valve closed
4/2/2011	5:24:02 PM	SiCl4 post valve closed
4/2/2011	5:24:02 PM	Bubbler valve closed
4/2/2011	5:24:02 PM	Helium valve opened
4/2/2011	5:24:02 PM	Main Vac valve opened
4/2/2011	5:24:02 PM	Bypass valve opened
4/2/2011	5:24:02 PM	Helium MFC set to  100.000000
4/2/2011	5:24:02 PM	H2 MFC set to  0.000000
4/2/2011	5:24:02 PM	BCl3 MFC set to  0.000000
4/2/2011	5:24:02 PM	PHl3 MFC set to  0.000000
4/2/2011	5:24:02 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:24:02 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:24:02 PM	Tube furnace set to 0
4/2/2011	5:25:02 PM	Helium valve closed
4/2/2011	5:25:02 PM	H2 valve closed
4/2/2011	5:25:02 PM	BCl3 valve closed
4/2/2011	5:25:02 PM	PH3 valve closed
4/2/2011	5:25:02 PM	SiCl4 pre valve closed
4/2/2011	5:25:02 PM	SiCl4 post valve closed
4/2/2011	5:25:02 PM	Bubbler valve closed
4/2/2011	5:25:02 PM	Main Vac valve opened
4/2/2011	5:25:02 PM	Bypass valve opened
4/2/2011	5:25:02 PM	Helium MFC set to  0.000000
4/2/2011	5:25:02 PM	H2 MFC set to  0.000000
4/2/2011	5:25:02 PM	BCl3 MFC set to  0.000000
4/2/2011	5:25:02 PM	PHl3 MFC set to  0.000000
4/2/2011	5:25:02 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:25:02 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:25:02 PM	Tube furnace set to 0
4/2/2011	5:26:02 PM	H2 valve closed
4/2/2011	5:26:02 PM	BCl3 valve closed
4/2/2011	5:26:02 PM	PH3 valve closed
4/2/2011	5:26:02 PM	SiCl4 pre valve closed
4/2/2011	5:26:02 PM	SiCl4 post valve closed
4/2/2011	5:26:02 PM	Bubbler valve closed
4/2/2011	5:26:02 PM	Helium valve opened
4/2/2011	5:26:02 PM	Main Vac valve opened
4/2/2011	5:26:02 PM	Bypass valve opened
4/2/2011	5:26:02 PM	Helium MFC set to  100.000000
4/2/2011	5:26:02 PM	H2 MFC set to  0.000000
4/2/2011	5:26:02 PM	BCl3 MFC set to  0.000000
4/2/2011	5:26:02 PM	PHl3 MFC set to  0.000000
4/2/2011	5:26:02 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:26:02 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:26:03 PM	Tube furnace set to 0
4/2/2011	5:27:03 PM	Helium valve closed
4/2/2011	5:27:03 PM	H2 valve closed
4/2/2011	5:27:03 PM	BCl3 valve closed
4/2/2011	5:27:03 PM	PH3 valve closed
4/2/2011	5:27:03 PM	SiCl4 pre valve closed
4/2/2011	5:27:03 PM	SiCl4 post valve closed
4/2/2011	5:27:03 PM	Bubbler valve closed
4/2/2011	5:27:03 PM	Main Vac valve opened
4/2/2011	5:27:03 PM	Bypass valve opened
4/2/2011	5:27:03 PM	Helium MFC set to  0.000000
4/2/2011	5:27:03 PM	H2 MFC set to  0.000000
4/2/2011	5:27:03 PM	BCl3 MFC set to  0.000000
4/2/2011	5:27:03 PM	PHl3 MFC set to  0.000000
4/2/2011	5:27:03 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:27:03 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:27:03 PM	Tube furnace set to 0
4/2/2011	5:28:03 PM	H2 valve closed
4/2/2011	5:28:03 PM	BCl3 valve closed
4/2/2011	5:28:03 PM	PH3 valve closed
4/2/2011	5:28:03 PM	SiCl4 pre valve closed
4/2/2011	5:28:03 PM	SiCl4 post valve closed
4/2/2011	5:28:03 PM	Bubbler valve closed
4/2/2011	5:28:03 PM	Helium valve opened
4/2/2011	5:28:03 PM	Main Vac valve opened
4/2/2011	5:28:03 PM	Bypass valve opened
4/2/2011	5:28:03 PM	Helium MFC set to  100.000000
4/2/2011	5:28:03 PM	H2 MFC set to  0.000000
4/2/2011	5:28:03 PM	BCl3 MFC set to  0.000000
4/2/2011	5:28:03 PM	PHl3 MFC set to  0.000000
4/2/2011	5:28:03 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:28:03 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:28:03 PM	Tube furnace set to 0
4/2/2011	5:29:03 PM	Helium valve closed
4/2/2011	5:29:03 PM	H2 valve closed
4/2/2011	5:29:03 PM	BCl3 valve closed
4/2/2011	5:29:03 PM	PH3 valve closed
4/2/2011	5:29:03 PM	SiCl4 pre valve closed
4/2/2011	5:29:03 PM	SiCl4 post valve closed
4/2/2011	5:29:03 PM	Bubbler valve closed
4/2/2011	5:29:03 PM	Main Vac valve opened
4/2/2011	5:29:03 PM	Bypass valve opened
4/2/2011	5:29:03 PM	Helium MFC set to  0.000000
4/2/2011	5:29:03 PM	H2 MFC set to  0.000000
4/2/2011	5:29:03 PM	BCl3 MFC set to  0.000000
4/2/2011	5:29:03 PM	PHl3 MFC set to  0.000000
4/2/2011	5:29:03 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:29:03 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:29:03 PM	Tube furnace set to 0
4/2/2011	5:30:03 PM	H2 valve closed
4/2/2011	5:30:03 PM	BCl3 valve closed
4/2/2011	5:30:03 PM	PH3 valve closed
4/2/2011	5:30:03 PM	SiCl4 pre valve closed
4/2/2011	5:30:03 PM	SiCl4 post valve closed
4/2/2011	5:30:03 PM	Bubbler valve closed
4/2/2011	5:30:03 PM	Helium valve opened
4/2/2011	5:30:03 PM	Main Vac valve opened
4/2/2011	5:30:03 PM	Bypass valve opened
4/2/2011	5:30:03 PM	Helium MFC set to  100.000000
4/2/2011	5:30:03 PM	H2 MFC set to  0.000000
4/2/2011	5:30:03 PM	BCl3 MFC set to  0.000000
4/2/2011	5:30:03 PM	PHl3 MFC set to  0.000000
4/2/2011	5:30:03 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:30:03 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:30:03 PM	Tube furnace set to 0
4/2/2011	5:31:03 PM	Helium valve closed
4/2/2011	5:31:03 PM	H2 valve closed
4/2/2011	5:31:03 PM	BCl3 valve closed
4/2/2011	5:31:03 PM	PH3 valve closed
4/2/2011	5:31:03 PM	SiCl4 pre valve closed
4/2/2011	5:31:03 PM	SiCl4 post valve closed
4/2/2011	5:31:03 PM	Bubbler valve closed
4/2/2011	5:31:03 PM	Main Vac valve opened
4/2/2011	5:31:03 PM	Bypass valve opened
4/2/2011	5:31:03 PM	Helium MFC set to  0.000000
4/2/2011	5:31:03 PM	H2 MFC set to  0.000000
4/2/2011	5:31:03 PM	BCl3 MFC set to  0.000000
4/2/2011	5:31:03 PM	PHl3 MFC set to  0.000000
4/2/2011	5:31:03 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:31:03 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:31:04 PM	Tube furnace set to 0
4/2/2011	5:32:04 PM	H2 valve closed
4/2/2011	5:32:04 PM	BCl3 valve closed
4/2/2011	5:32:04 PM	PH3 valve closed
4/2/2011	5:32:04 PM	SiCl4 pre valve closed
4/2/2011	5:32:04 PM	SiCl4 post valve closed
4/2/2011	5:32:04 PM	Bubbler valve closed
4/2/2011	5:32:04 PM	Helium valve opened
4/2/2011	5:32:04 PM	Main Vac valve opened
4/2/2011	5:32:04 PM	Bypass valve opened
4/2/2011	5:32:04 PM	Helium MFC set to  100.000000
4/2/2011	5:32:04 PM	H2 MFC set to  0.000000
4/2/2011	5:32:04 PM	BCl3 MFC set to  0.000000
4/2/2011	5:32:04 PM	PHl3 MFC set to  0.000000
4/2/2011	5:32:04 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:32:04 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:32:04 PM	Tube furnace set to 0
4/2/2011	5:33:04 PM	Helium valve closed
4/2/2011	5:33:04 PM	H2 valve closed
4/2/2011	5:33:04 PM	BCl3 valve closed
4/2/2011	5:33:04 PM	PH3 valve closed
4/2/2011	5:33:04 PM	SiCl4 pre valve closed
4/2/2011	5:33:04 PM	SiCl4 post valve closed
4/2/2011	5:33:04 PM	Bubbler valve closed
4/2/2011	5:33:04 PM	Main Vac valve opened
4/2/2011	5:33:04 PM	Bypass valve opened
4/2/2011	5:33:04 PM	Helium MFC set to  0.000000
4/2/2011	5:33:04 PM	H2 MFC set to  0.000000
4/2/2011	5:33:04 PM	BCl3 MFC set to  0.000000
4/2/2011	5:33:04 PM	PHl3 MFC set to  0.000000
4/2/2011	5:33:04 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:33:04 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:33:04 PM	Tube furnace set to 0
4/2/2011	5:34:04 PM	H2 valve closed
4/2/2011	5:34:04 PM	BCl3 valve closed
4/2/2011	5:34:04 PM	PH3 valve closed
4/2/2011	5:34:04 PM	SiCl4 pre valve closed
4/2/2011	5:34:04 PM	SiCl4 post valve closed
4/2/2011	5:34:04 PM	Bubbler valve closed
4/2/2011	5:34:04 PM	Helium valve opened
4/2/2011	5:34:04 PM	Main Vac valve opened
4/2/2011	5:34:04 PM	Bypass valve opened
4/2/2011	5:34:04 PM	Helium MFC set to  100.000000
4/2/2011	5:34:04 PM	H2 MFC set to  0.000000
4/2/2011	5:34:04 PM	BCl3 MFC set to  0.000000
4/2/2011	5:34:04 PM	PHl3 MFC set to  0.000000
4/2/2011	5:34:04 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:34:04 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:34:04 PM	Tube furnace set to 0
4/2/2011	5:35:04 PM	Helium valve closed
4/2/2011	5:35:04 PM	H2 valve closed
4/2/2011	5:35:04 PM	BCl3 valve closed
4/2/2011	5:35:04 PM	PH3 valve closed
4/2/2011	5:35:04 PM	SiCl4 pre valve closed
4/2/2011	5:35:04 PM	SiCl4 post valve closed
4/2/2011	5:35:04 PM	Bubbler valve closed
4/2/2011	5:35:04 PM	Main Vac valve opened
4/2/2011	5:35:04 PM	Bypass valve opened
4/2/2011	5:35:04 PM	Helium MFC set to  0.000000
4/2/2011	5:35:04 PM	H2 MFC set to  0.000000
4/2/2011	5:35:04 PM	BCl3 MFC set to  0.000000
4/2/2011	5:35:04 PM	PHl3 MFC set to  0.000000
4/2/2011	5:35:04 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:35:04 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:35:04 PM	Tube furnace set to 0
4/2/2011	5:36:04 PM	H2 valve closed
4/2/2011	5:36:04 PM	BCl3 valve closed
4/2/2011	5:36:04 PM	PH3 valve closed
4/2/2011	5:36:04 PM	SiCl4 pre valve closed
4/2/2011	5:36:04 PM	SiCl4 post valve closed
4/2/2011	5:36:04 PM	Bubbler valve closed
4/2/2011	5:36:04 PM	Helium valve opened
4/2/2011	5:36:04 PM	Main Vac valve opened
4/2/2011	5:36:04 PM	Bypass valve opened
4/2/2011	5:36:04 PM	Helium MFC set to  100.000000
4/2/2011	5:36:04 PM	H2 MFC set to  0.000000
4/2/2011	5:36:04 PM	BCl3 MFC set to  0.000000
4/2/2011	5:36:04 PM	PHl3 MFC set to  0.000000
4/2/2011	5:36:04 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:36:04 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:36:05 PM	Tube furnace set to 0
4/2/2011	5:37:05 PM	Helium valve closed
4/2/2011	5:37:05 PM	H2 valve closed
4/2/2011	5:37:05 PM	BCl3 valve closed
4/2/2011	5:37:05 PM	PH3 valve closed
4/2/2011	5:37:05 PM	SiCl4 pre valve closed
4/2/2011	5:37:05 PM	SiCl4 post valve closed
4/2/2011	5:37:05 PM	Bubbler valve closed
4/2/2011	5:37:05 PM	Main Vac valve opened
4/2/2011	5:37:05 PM	Bypass valve opened
4/2/2011	5:37:05 PM	Helium MFC set to  0.000000
4/2/2011	5:37:05 PM	H2 MFC set to  0.000000
4/2/2011	5:37:05 PM	BCl3 MFC set to  0.000000
4/2/2011	5:37:05 PM	PHl3 MFC set to  0.000000
4/2/2011	5:37:05 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:37:05 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:37:05 PM	Tube furnace set to 0
4/2/2011	5:37:06 PM	Run finished at 5:37 PM
4/2/2011	5:37:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/2/2011	5:39:52 PM	Helium valve opened
4/2/2011	5:39:55 PM	Helium MFC set to  100.000000
4/2/2011	5:40:10 PM	Helium MFC set to  0.000000
4/2/2011	5:40:12 PM	Helium valve closed
4/2/2011	5:40:51 PM	Recipe started at 5:40 PM
4/2/2011	5:40:51 PM	Helium valve closed
4/2/2011	5:40:51 PM	BCl3 valve closed
4/2/2011	5:40:51 PM	PH3 valve closed
4/2/2011	5:40:51 PM	SiCl4 pre valve closed
4/2/2011	5:40:51 PM	SiCl4 post valve closed
4/2/2011	5:40:51 PM	Main Vac valve closed
4/2/2011	5:40:51 PM	Bypass valve closed
4/2/2011	5:40:51 PM	Bubbler valve closed
4/2/2011	5:40:51 PM	H2 valve opened
4/2/2011	5:40:51 PM	Helium MFC set to  0.000000
4/2/2011	5:40:51 PM	H2 MFC set to  500.000000
4/2/2011	5:40:51 PM	BCl3 MFC set to  0.000000
4/2/2011	5:40:51 PM	PHl3 MFC set to  0.000000
4/2/2011	5:40:51 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:40:51 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:40:52 PM	Tube furnace set to 0
4/2/2011	5:42:09 PM	Helium valve closed
4/2/2011	5:42:09 PM	BCl3 valve closed
4/2/2011	5:42:09 PM	PH3 valve closed
4/2/2011	5:42:09 PM	SiCl4 pre valve closed
4/2/2011	5:42:09 PM	SiCl4 post valve closed
4/2/2011	5:42:09 PM	Main Vac valve closed
4/2/2011	5:42:09 PM	Bypass valve closed
4/2/2011	5:42:09 PM	H2 valve opened
4/2/2011	5:42:09 PM	Bubbler valve opened
4/2/2011	5:42:09 PM	Helium MFC set to  0.000000
4/2/2011	5:42:09 PM	H2 MFC set to  500.000000
4/2/2011	5:42:09 PM	BCl3 MFC set to  0.000000
4/2/2011	5:42:09 PM	PHl3 MFC set to  0.000000
4/2/2011	5:42:09 PM	SiCl4 MFC set to  0.000000
4/2/2011	5:42:09 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	5:42:09 PM	Tube furnace set to 1025
4/2/2011	6:02:09 PM	Helium valve closed
4/2/2011	6:02:09 PM	PH3 valve closed
4/2/2011	6:02:09 PM	Main Vac valve closed
4/2/2011	6:02:09 PM	Bypass valve closed
4/2/2011	6:02:09 PM	H2 valve opened
4/2/2011	6:02:09 PM	BCl3 valve opened
4/2/2011	6:02:09 PM	SiCl4 pre valve opened
4/2/2011	6:02:09 PM	SiCl4 post valve opened
4/2/2011	6:02:09 PM	Bubbler valve opened
4/2/2011	6:02:09 PM	Helium MFC set to  0.000000
4/2/2011	6:02:09 PM	H2 MFC set to  500.000000
4/2/2011	6:02:09 PM	BCl3 MFC set to  3.000000
4/2/2011	6:02:09 PM	PHl3 MFC set to  0.000000
4/2/2011	6:02:09 PM	SiCl4 MFC set to  50.000000
4/2/2011	6:02:09 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:02:10 PM	Tube furnace set to 1025
4/2/2011	6:22:10 PM	H2 valve closed
4/2/2011	6:22:10 PM	BCl3 valve closed
4/2/2011	6:22:10 PM	PH3 valve closed
4/2/2011	6:22:10 PM	SiCl4 pre valve closed
4/2/2011	6:22:10 PM	SiCl4 post valve closed
4/2/2011	6:22:10 PM	Main Vac valve closed
4/2/2011	6:22:10 PM	Bypass valve closed
4/2/2011	6:22:10 PM	Helium valve opened
4/2/2011	6:22:10 PM	Bubbler valve opened
4/2/2011	6:22:10 PM	Helium MFC set to  500.000000
4/2/2011	6:22:10 PM	H2 MFC set to  0.000000
4/2/2011	6:22:10 PM	BCl3 MFC set to  0.000000
4/2/2011	6:22:10 PM	PHl3 MFC set to  0.000000
4/2/2011	6:22:10 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:22:10 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:22:10 PM	Tube furnace set to 0
4/2/2011	6:37:54 PM	Run aborted at 6:37 PM
4/2/2011	6:37:54 PM	Helium valve closed
4/2/2011	6:37:54 PM	H2 valve closed
4/2/2011	6:37:54 PM	BCl3 valve closed
4/2/2011	6:37:54 PM	PH3 valve closed
4/2/2011	6:37:54 PM	SiCl4 pre valve closed
4/2/2011	6:37:54 PM	SiCl4 post valve closed
4/2/2011	6:37:54 PM	Bypass valve closed
4/2/2011	6:37:54 PM	Main Vac valve closed
4/2/2011	6:37:54 PM	Bubbler valve closed
4/2/2011	6:37:54 PM	Helium MFC set to  0.000000
4/2/2011	6:37:54 PM	H2 MFC set to  0.000000
4/2/2011	6:37:54 PM	BCl3 MFC set to  0.000000
4/2/2011	6:37:54 PM	PHl3 MFC set to  0.000000
4/2/2011	6:37:54 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:37:54 PM	Tube furnace set to 0
4/2/2011	6:41:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	6:41:03 PM	Recipe started at 6:41 PM
4/2/2011	6:41:03 PM	Helium valve closed
4/2/2011	6:41:03 PM	H2 valve closed
4/2/2011	6:41:03 PM	BCl3 valve closed
4/2/2011	6:41:03 PM	PH3 valve closed
4/2/2011	6:41:03 PM	SiCl4 pre valve closed
4/2/2011	6:41:03 PM	SiCl4 post valve closed
4/2/2011	6:41:03 PM	Main Vac valve closed
4/2/2011	6:41:03 PM	Bubbler valve closed
4/2/2011	6:41:03 PM	Bypass valve opened
4/2/2011	6:41:03 PM	Helium MFC set to  0.000000
4/2/2011	6:41:03 PM	H2 MFC set to  0.000000
4/2/2011	6:41:03 PM	BCl3 MFC set to  0.000000
4/2/2011	6:41:03 PM	PHl3 MFC set to  0.000000
4/2/2011	6:41:03 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:41:03 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:41:03 PM	Tube furnace set to 0
4/2/2011	6:41:35 PM	Helium valve closed
4/2/2011	6:41:35 PM	H2 valve closed
4/2/2011	6:41:35 PM	BCl3 valve closed
4/2/2011	6:41:35 PM	PH3 valve closed
4/2/2011	6:41:35 PM	SiCl4 pre valve closed
4/2/2011	6:41:35 PM	SiCl4 post valve closed
4/2/2011	6:41:35 PM	Bubbler valve closed
4/2/2011	6:41:35 PM	Main Vac valve opened
4/2/2011	6:41:35 PM	Bypass valve opened
4/2/2011	6:41:35 PM	Helium MFC set to  0.000000
4/2/2011	6:41:35 PM	H2 MFC set to  0.000000
4/2/2011	6:41:35 PM	BCl3 MFC set to  0.000000
4/2/2011	6:41:35 PM	PHl3 MFC set to  0.000000
4/2/2011	6:41:35 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:41:35 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:41:35 PM	Tube furnace set to 0
4/2/2011	6:41:35 PM	Run finished at 6:41 PM
4/2/2011	6:41:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	6:43:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/2/2011	6:43:22 PM	Recipe started at 6:43 PM
4/2/2011	6:43:22 PM	Helium valve closed
4/2/2011	6:43:22 PM	H2 valve closed
4/2/2011	6:43:22 PM	BCl3 valve closed
4/2/2011	6:43:22 PM	PH3 valve closed
4/2/2011	6:43:22 PM	SiCl4 pre valve closed
4/2/2011	6:43:22 PM	SiCl4 post valve closed
4/2/2011	6:43:22 PM	Main Vac valve closed
4/2/2011	6:43:22 PM	Bubbler valve closed
4/2/2011	6:43:22 PM	Bypass valve opened
4/2/2011	6:43:22 PM	Helium MFC set to  0.000000
4/2/2011	6:43:22 PM	H2 MFC set to  0.000000
4/2/2011	6:43:22 PM	BCl3 MFC set to  0.000000
4/2/2011	6:43:22 PM	PHl3 MFC set to  0.000000
4/2/2011	6:43:22 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:43:22 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:43:22 PM	Tube furnace set to 0
4/2/2011	6:43:22 PM	Helium valve closed
4/2/2011	6:43:22 PM	H2 valve closed
4/2/2011	6:43:22 PM	BCl3 valve closed
4/2/2011	6:43:22 PM	PH3 valve closed
4/2/2011	6:43:22 PM	SiCl4 pre valve closed
4/2/2011	6:43:22 PM	SiCl4 post valve closed
4/2/2011	6:43:22 PM	Bubbler valve closed
4/2/2011	6:43:22 PM	Main Vac valve opened
4/2/2011	6:43:22 PM	Bypass valve opened
4/2/2011	6:43:22 PM	Helium MFC set to  0.000000
4/2/2011	6:43:22 PM	H2 MFC set to  0.000000
4/2/2011	6:43:22 PM	BCl3 MFC set to  0.000000
4/2/2011	6:43:22 PM	PHl3 MFC set to  0.000000
4/2/2011	6:43:22 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:43:22 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:43:22 PM	Tube furnace set to 0
4/2/2011	6:44:22 PM	H2 valve closed
4/2/2011	6:44:22 PM	BCl3 valve closed
4/2/2011	6:44:22 PM	PH3 valve closed
4/2/2011	6:44:22 PM	SiCl4 pre valve closed
4/2/2011	6:44:22 PM	SiCl4 post valve closed
4/2/2011	6:44:22 PM	Bubbler valve closed
4/2/2011	6:44:22 PM	Helium valve opened
4/2/2011	6:44:22 PM	Main Vac valve opened
4/2/2011	6:44:22 PM	Bypass valve opened
4/2/2011	6:44:22 PM	Helium MFC set to  100.000000
4/2/2011	6:44:22 PM	H2 MFC set to  0.000000
4/2/2011	6:44:22 PM	BCl3 MFC set to  0.000000
4/2/2011	6:44:22 PM	PHl3 MFC set to  0.000000
4/2/2011	6:44:22 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:44:22 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:44:22 PM	Tube furnace set to 0
4/2/2011	6:45:22 PM	Helium valve closed
4/2/2011	6:45:22 PM	H2 valve closed
4/2/2011	6:45:22 PM	BCl3 valve closed
4/2/2011	6:45:22 PM	PH3 valve closed
4/2/2011	6:45:22 PM	SiCl4 pre valve closed
4/2/2011	6:45:22 PM	SiCl4 post valve closed
4/2/2011	6:45:22 PM	Bubbler valve closed
4/2/2011	6:45:22 PM	Main Vac valve opened
4/2/2011	6:45:22 PM	Bypass valve opened
4/2/2011	6:45:22 PM	Helium MFC set to  0.000000
4/2/2011	6:45:22 PM	H2 MFC set to  0.000000
4/2/2011	6:45:22 PM	BCl3 MFC set to  0.000000
4/2/2011	6:45:22 PM	PHl3 MFC set to  0.000000
4/2/2011	6:45:22 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:45:22 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:45:23 PM	Tube furnace set to 0
4/2/2011	6:46:23 PM	H2 valve closed
4/2/2011	6:46:23 PM	BCl3 valve closed
4/2/2011	6:46:23 PM	PH3 valve closed
4/2/2011	6:46:23 PM	SiCl4 pre valve closed
4/2/2011	6:46:23 PM	SiCl4 post valve closed
4/2/2011	6:46:23 PM	Bubbler valve closed
4/2/2011	6:46:23 PM	Helium valve opened
4/2/2011	6:46:23 PM	Main Vac valve opened
4/2/2011	6:46:23 PM	Bypass valve opened
4/2/2011	6:46:23 PM	Helium MFC set to  100.000000
4/2/2011	6:46:23 PM	H2 MFC set to  0.000000
4/2/2011	6:46:23 PM	BCl3 MFC set to  0.000000
4/2/2011	6:46:23 PM	PHl3 MFC set to  0.000000
4/2/2011	6:46:23 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:46:23 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:46:23 PM	Tube furnace set to 0
4/2/2011	6:47:23 PM	Helium valve closed
4/2/2011	6:47:23 PM	H2 valve closed
4/2/2011	6:47:23 PM	BCl3 valve closed
4/2/2011	6:47:23 PM	PH3 valve closed
4/2/2011	6:47:23 PM	SiCl4 pre valve closed
4/2/2011	6:47:23 PM	SiCl4 post valve closed
4/2/2011	6:47:23 PM	Bubbler valve closed
4/2/2011	6:47:23 PM	Main Vac valve opened
4/2/2011	6:47:23 PM	Bypass valve opened
4/2/2011	6:47:23 PM	Helium MFC set to  0.000000
4/2/2011	6:47:23 PM	H2 MFC set to  0.000000
4/2/2011	6:47:23 PM	BCl3 MFC set to  0.000000
4/2/2011	6:47:23 PM	PHl3 MFC set to  0.000000
4/2/2011	6:47:23 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:47:23 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:47:23 PM	Tube furnace set to 0
4/2/2011	6:48:23 PM	H2 valve closed
4/2/2011	6:48:23 PM	BCl3 valve closed
4/2/2011	6:48:23 PM	PH3 valve closed
4/2/2011	6:48:23 PM	SiCl4 pre valve closed
4/2/2011	6:48:23 PM	SiCl4 post valve closed
4/2/2011	6:48:23 PM	Bubbler valve closed
4/2/2011	6:48:23 PM	Helium valve opened
4/2/2011	6:48:23 PM	Main Vac valve opened
4/2/2011	6:48:23 PM	Bypass valve opened
4/2/2011	6:48:23 PM	Helium MFC set to  100.000000
4/2/2011	6:48:23 PM	H2 MFC set to  0.000000
4/2/2011	6:48:23 PM	BCl3 MFC set to  0.000000
4/2/2011	6:48:23 PM	PHl3 MFC set to  0.000000
4/2/2011	6:48:23 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:48:23 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:48:23 PM	Tube furnace set to 0
4/2/2011	6:49:23 PM	Helium valve closed
4/2/2011	6:49:23 PM	H2 valve closed
4/2/2011	6:49:23 PM	BCl3 valve closed
4/2/2011	6:49:23 PM	PH3 valve closed
4/2/2011	6:49:23 PM	SiCl4 pre valve closed
4/2/2011	6:49:23 PM	SiCl4 post valve closed
4/2/2011	6:49:23 PM	Bubbler valve closed
4/2/2011	6:49:23 PM	Main Vac valve opened
4/2/2011	6:49:23 PM	Bypass valve opened
4/2/2011	6:49:23 PM	Helium MFC set to  0.000000
4/2/2011	6:49:23 PM	H2 MFC set to  0.000000
4/2/2011	6:49:23 PM	BCl3 MFC set to  0.000000
4/2/2011	6:49:23 PM	PHl3 MFC set to  0.000000
4/2/2011	6:49:23 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:49:23 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:49:23 PM	Tube furnace set to 0
4/2/2011	6:50:23 PM	H2 valve closed
4/2/2011	6:50:23 PM	BCl3 valve closed
4/2/2011	6:50:23 PM	PH3 valve closed
4/2/2011	6:50:23 PM	SiCl4 pre valve closed
4/2/2011	6:50:23 PM	SiCl4 post valve closed
4/2/2011	6:50:23 PM	Bubbler valve closed
4/2/2011	6:50:23 PM	Helium valve opened
4/2/2011	6:50:23 PM	Main Vac valve opened
4/2/2011	6:50:23 PM	Bypass valve opened
4/2/2011	6:50:23 PM	Helium MFC set to  100.000000
4/2/2011	6:50:23 PM	H2 MFC set to  0.000000
4/2/2011	6:50:23 PM	BCl3 MFC set to  0.000000
4/2/2011	6:50:23 PM	PHl3 MFC set to  0.000000
4/2/2011	6:50:23 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:50:23 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:50:24 PM	Tube furnace set to 0
4/2/2011	6:51:24 PM	Helium valve closed
4/2/2011	6:51:24 PM	H2 valve closed
4/2/2011	6:51:24 PM	BCl3 valve closed
4/2/2011	6:51:24 PM	PH3 valve closed
4/2/2011	6:51:24 PM	SiCl4 pre valve closed
4/2/2011	6:51:24 PM	SiCl4 post valve closed
4/2/2011	6:51:24 PM	Bubbler valve closed
4/2/2011	6:51:24 PM	Main Vac valve opened
4/2/2011	6:51:24 PM	Bypass valve opened
4/2/2011	6:51:24 PM	Helium MFC set to  0.000000
4/2/2011	6:51:24 PM	H2 MFC set to  0.000000
4/2/2011	6:51:24 PM	BCl3 MFC set to  0.000000
4/2/2011	6:51:24 PM	PHl3 MFC set to  0.000000
4/2/2011	6:51:24 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:51:24 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:51:24 PM	Tube furnace set to 0
4/2/2011	6:52:24 PM	H2 valve closed
4/2/2011	6:52:24 PM	BCl3 valve closed
4/2/2011	6:52:24 PM	PH3 valve closed
4/2/2011	6:52:24 PM	SiCl4 pre valve closed
4/2/2011	6:52:24 PM	SiCl4 post valve closed
4/2/2011	6:52:24 PM	Bubbler valve closed
4/2/2011	6:52:24 PM	Helium valve opened
4/2/2011	6:52:24 PM	Main Vac valve opened
4/2/2011	6:52:24 PM	Bypass valve opened
4/2/2011	6:52:24 PM	Helium MFC set to  100.000000
4/2/2011	6:52:24 PM	H2 MFC set to  0.000000
4/2/2011	6:52:24 PM	BCl3 MFC set to  0.000000
4/2/2011	6:52:24 PM	PHl3 MFC set to  0.000000
4/2/2011	6:52:24 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:52:24 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:52:24 PM	Tube furnace set to 0
4/2/2011	6:53:24 PM	Helium valve closed
4/2/2011	6:53:24 PM	H2 valve closed
4/2/2011	6:53:24 PM	BCl3 valve closed
4/2/2011	6:53:24 PM	PH3 valve closed
4/2/2011	6:53:24 PM	SiCl4 pre valve closed
4/2/2011	6:53:24 PM	SiCl4 post valve closed
4/2/2011	6:53:24 PM	Bubbler valve closed
4/2/2011	6:53:24 PM	Main Vac valve opened
4/2/2011	6:53:24 PM	Bypass valve opened
4/2/2011	6:53:24 PM	Helium MFC set to  0.000000
4/2/2011	6:53:24 PM	H2 MFC set to  0.000000
4/2/2011	6:53:24 PM	BCl3 MFC set to  0.000000
4/2/2011	6:53:24 PM	PHl3 MFC set to  0.000000
4/2/2011	6:53:24 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:53:24 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:53:24 PM	Tube furnace set to 0
4/2/2011	6:54:24 PM	H2 valve closed
4/2/2011	6:54:24 PM	BCl3 valve closed
4/2/2011	6:54:24 PM	PH3 valve closed
4/2/2011	6:54:24 PM	SiCl4 pre valve closed
4/2/2011	6:54:24 PM	SiCl4 post valve closed
4/2/2011	6:54:24 PM	Bubbler valve closed
4/2/2011	6:54:24 PM	Helium valve opened
4/2/2011	6:54:24 PM	Main Vac valve opened
4/2/2011	6:54:24 PM	Bypass valve opened
4/2/2011	6:54:24 PM	Helium MFC set to  100.000000
4/2/2011	6:54:24 PM	H2 MFC set to  0.000000
4/2/2011	6:54:24 PM	BCl3 MFC set to  0.000000
4/2/2011	6:54:24 PM	PHl3 MFC set to  0.000000
4/2/2011	6:54:24 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:54:24 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:54:24 PM	Tube furnace set to 0
4/2/2011	6:55:24 PM	Helium valve closed
4/2/2011	6:55:24 PM	H2 valve closed
4/2/2011	6:55:24 PM	BCl3 valve closed
4/2/2011	6:55:24 PM	PH3 valve closed
4/2/2011	6:55:24 PM	SiCl4 pre valve closed
4/2/2011	6:55:24 PM	SiCl4 post valve closed
4/2/2011	6:55:24 PM	Bubbler valve closed
4/2/2011	6:55:24 PM	Main Vac valve opened
4/2/2011	6:55:24 PM	Bypass valve opened
4/2/2011	6:55:24 PM	Helium MFC set to  0.000000
4/2/2011	6:55:24 PM	H2 MFC set to  0.000000
4/2/2011	6:55:24 PM	BCl3 MFC set to  0.000000
4/2/2011	6:55:24 PM	PHl3 MFC set to  0.000000
4/2/2011	6:55:24 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:55:24 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:55:25 PM	Tube furnace set to 0
4/2/2011	6:56:25 PM	H2 valve closed
4/2/2011	6:56:25 PM	BCl3 valve closed
4/2/2011	6:56:25 PM	PH3 valve closed
4/2/2011	6:56:25 PM	SiCl4 pre valve closed
4/2/2011	6:56:25 PM	SiCl4 post valve closed
4/2/2011	6:56:25 PM	Bubbler valve closed
4/2/2011	6:56:25 PM	Helium valve opened
4/2/2011	6:56:25 PM	Main Vac valve opened
4/2/2011	6:56:25 PM	Bypass valve opened
4/2/2011	6:56:25 PM	Helium MFC set to  100.000000
4/2/2011	6:56:25 PM	H2 MFC set to  0.000000
4/2/2011	6:56:25 PM	BCl3 MFC set to  0.000000
4/2/2011	6:56:25 PM	PHl3 MFC set to  0.000000
4/2/2011	6:56:25 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:56:25 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:56:25 PM	Tube furnace set to 0
4/2/2011	6:57:25 PM	Helium valve closed
4/2/2011	6:57:25 PM	H2 valve closed
4/2/2011	6:57:25 PM	BCl3 valve closed
4/2/2011	6:57:25 PM	PH3 valve closed
4/2/2011	6:57:25 PM	SiCl4 pre valve closed
4/2/2011	6:57:25 PM	SiCl4 post valve closed
4/2/2011	6:57:25 PM	Bubbler valve closed
4/2/2011	6:57:25 PM	Main Vac valve opened
4/2/2011	6:57:25 PM	Bypass valve opened
4/2/2011	6:57:25 PM	Helium MFC set to  0.000000
4/2/2011	6:57:25 PM	H2 MFC set to  0.000000
4/2/2011	6:57:25 PM	BCl3 MFC set to  0.000000
4/2/2011	6:57:25 PM	PHl3 MFC set to  0.000000
4/2/2011	6:57:25 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:57:25 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:57:25 PM	Tube furnace set to 0
4/2/2011	6:58:25 PM	H2 valve closed
4/2/2011	6:58:25 PM	BCl3 valve closed
4/2/2011	6:58:25 PM	PH3 valve closed
4/2/2011	6:58:25 PM	SiCl4 pre valve closed
4/2/2011	6:58:25 PM	SiCl4 post valve closed
4/2/2011	6:58:25 PM	Bubbler valve closed
4/2/2011	6:58:25 PM	Helium valve opened
4/2/2011	6:58:25 PM	Main Vac valve opened
4/2/2011	6:58:25 PM	Bypass valve opened
4/2/2011	6:58:25 PM	Helium MFC set to  100.000000
4/2/2011	6:58:25 PM	H2 MFC set to  0.000000
4/2/2011	6:58:25 PM	BCl3 MFC set to  0.000000
4/2/2011	6:58:25 PM	PHl3 MFC set to  0.000000
4/2/2011	6:58:25 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:58:25 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:58:25 PM	Tube furnace set to 0
4/2/2011	6:59:25 PM	Helium valve closed
4/2/2011	6:59:25 PM	H2 valve closed
4/2/2011	6:59:25 PM	BCl3 valve closed
4/2/2011	6:59:25 PM	PH3 valve closed
4/2/2011	6:59:25 PM	SiCl4 pre valve closed
4/2/2011	6:59:25 PM	SiCl4 post valve closed
4/2/2011	6:59:25 PM	Bubbler valve closed
4/2/2011	6:59:25 PM	Main Vac valve opened
4/2/2011	6:59:25 PM	Bypass valve opened
4/2/2011	6:59:25 PM	Helium MFC set to  0.000000
4/2/2011	6:59:25 PM	H2 MFC set to  0.000000
4/2/2011	6:59:25 PM	BCl3 MFC set to  0.000000
4/2/2011	6:59:25 PM	PHl3 MFC set to  0.000000
4/2/2011	6:59:25 PM	SiCl4 MFC set to  0.000000
4/2/2011	6:59:25 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	6:59:25 PM	Tube furnace set to 0
4/2/2011	7:00:03 PM	Run aborted at 7:00 PM
4/2/2011	7:00:03 PM	Helium valve closed
4/2/2011	7:00:03 PM	H2 valve closed
4/2/2011	7:00:03 PM	BCl3 valve closed
4/2/2011	7:00:03 PM	PH3 valve closed
4/2/2011	7:00:03 PM	SiCl4 pre valve closed
4/2/2011	7:00:03 PM	SiCl4 post valve closed
4/2/2011	7:00:03 PM	Bypass valve closed
4/2/2011	7:00:03 PM	Main Vac valve closed
4/2/2011	7:00:03 PM	Bubbler valve closed
4/2/2011	7:00:03 PM	Helium MFC set to  0.000000
4/2/2011	7:00:03 PM	H2 MFC set to  0.000000
4/2/2011	7:00:03 PM	BCl3 MFC set to  0.000000
4/2/2011	7:00:03 PM	PHl3 MFC set to  0.000000
4/2/2011	7:00:03 PM	SiCl4 MFC set to  0.000000
4/2/2011	7:00:03 PM	Tube furnace set to 0
4/2/2011	7:00:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/2/2011	7:00:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	7:00:06 PM	Recipe started at 7:00 PM
4/2/2011	7:00:06 PM	Helium valve closed
4/2/2011	7:00:06 PM	H2 valve closed
4/2/2011	7:00:06 PM	BCl3 valve closed
4/2/2011	7:00:06 PM	PH3 valve closed
4/2/2011	7:00:06 PM	SiCl4 pre valve closed
4/2/2011	7:00:06 PM	SiCl4 post valve closed
4/2/2011	7:00:06 PM	Main Vac valve closed
4/2/2011	7:00:06 PM	Bubbler valve closed
4/2/2011	7:00:06 PM	Bypass valve opened
4/2/2011	7:00:06 PM	Helium MFC set to  0.000000
4/2/2011	7:00:06 PM	H2 MFC set to  0.000000
4/2/2011	7:00:06 PM	BCl3 MFC set to  0.000000
4/2/2011	7:00:06 PM	PHl3 MFC set to  0.000000
4/2/2011	7:00:06 PM	SiCl4 MFC set to  0.000000
4/2/2011	7:00:06 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	7:00:06 PM	Tube furnace set to 0
4/2/2011	7:00:06 PM	Helium valve closed
4/2/2011	7:00:06 PM	H2 valve closed
4/2/2011	7:00:06 PM	BCl3 valve closed
4/2/2011	7:00:06 PM	PH3 valve closed
4/2/2011	7:00:06 PM	SiCl4 pre valve closed
4/2/2011	7:00:06 PM	SiCl4 post valve closed
4/2/2011	7:00:06 PM	Bubbler valve closed
4/2/2011	7:00:06 PM	Main Vac valve opened
4/2/2011	7:00:06 PM	Bypass valve opened
4/2/2011	7:00:06 PM	Helium MFC set to  0.000000
4/2/2011	7:00:06 PM	H2 MFC set to  0.000000
4/2/2011	7:00:06 PM	BCl3 MFC set to  0.000000
4/2/2011	7:00:06 PM	PHl3 MFC set to  0.000000
4/2/2011	7:00:06 PM	SiCl4 MFC set to  0.000000
4/2/2011	7:00:06 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	7:00:07 PM	Tube furnace set to 0
4/2/2011	7:00:07 PM	Run finished at 7:00 PM
4/2/2011	7:00:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2011	7:00:28 PM	Recipe started at 7:00 PM
4/2/2011	7:00:28 PM	Helium valve closed
4/2/2011	7:00:28 PM	BCl3 valve closed
4/2/2011	7:00:28 PM	PH3 valve closed
4/2/2011	7:00:28 PM	SiCl4 pre valve closed
4/2/2011	7:00:28 PM	SiCl4 post valve closed
4/2/2011	7:00:28 PM	Main Vac valve closed
4/2/2011	7:00:28 PM	Bypass valve closed
4/2/2011	7:00:28 PM	Bubbler valve closed
4/2/2011	7:00:28 PM	H2 valve opened
4/2/2011	7:00:28 PM	Helium MFC set to  0.000000
4/2/2011	7:00:28 PM	H2 MFC set to  500.000000
4/2/2011	7:00:28 PM	BCl3 MFC set to  0.000000
4/2/2011	7:00:28 PM	PHl3 MFC set to  0.000000
4/2/2011	7:00:28 PM	SiCl4 MFC set to  0.000000
4/2/2011	7:00:28 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	7:00:29 PM	Tube furnace set to 0
4/2/2011	7:01:49 PM	Helium valve closed
4/2/2011	7:01:49 PM	BCl3 valve closed
4/2/2011	7:01:49 PM	PH3 valve closed
4/2/2011	7:01:49 PM	SiCl4 pre valve closed
4/2/2011	7:01:49 PM	SiCl4 post valve closed
4/2/2011	7:01:49 PM	Main Vac valve closed
4/2/2011	7:01:49 PM	Bypass valve closed
4/2/2011	7:01:49 PM	H2 valve opened
4/2/2011	7:01:49 PM	Bubbler valve opened
4/2/2011	7:01:49 PM	Helium MFC set to  0.000000
4/2/2011	7:01:49 PM	H2 MFC set to  500.000000
4/2/2011	7:01:49 PM	BCl3 MFC set to  0.000000
4/2/2011	7:01:49 PM	PHl3 MFC set to  0.000000
4/2/2011	7:01:49 PM	SiCl4 MFC set to  0.000000
4/2/2011	7:01:49 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	7:01:49 PM	Tube furnace set to 1035
4/2/2011	7:21:49 PM	Helium valve closed
4/2/2011	7:21:49 PM	PH3 valve closed
4/2/2011	7:21:49 PM	Main Vac valve closed
4/2/2011	7:21:49 PM	Bypass valve closed
4/2/2011	7:21:49 PM	H2 valve opened
4/2/2011	7:21:49 PM	BCl3 valve opened
4/2/2011	7:21:49 PM	SiCl4 pre valve opened
4/2/2011	7:21:49 PM	SiCl4 post valve opened
4/2/2011	7:21:49 PM	Bubbler valve opened
4/2/2011	7:21:49 PM	Helium MFC set to  0.000000
4/2/2011	7:21:49 PM	H2 MFC set to  500.000000
4/2/2011	7:21:49 PM	BCl3 MFC set to  3.000000
4/2/2011	7:21:49 PM	PHl3 MFC set to  0.000000
4/2/2011	7:21:49 PM	SiCl4 MFC set to  50.000000
4/2/2011	7:21:49 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	7:21:49 PM	Tube furnace set to 1035
4/2/2011	7:41:49 PM	H2 valve closed
4/2/2011	7:41:49 PM	BCl3 valve closed
4/2/2011	7:41:49 PM	PH3 valve closed
4/2/2011	7:41:49 PM	SiCl4 pre valve closed
4/2/2011	7:41:49 PM	SiCl4 post valve closed
4/2/2011	7:41:49 PM	Main Vac valve closed
4/2/2011	7:41:49 PM	Bypass valve closed
4/2/2011	7:41:49 PM	Helium valve opened
4/2/2011	7:41:49 PM	Bubbler valve opened
4/2/2011	7:41:49 PM	Helium MFC set to  500.000000
4/2/2011	7:41:49 PM	H2 MFC set to  0.000000
4/2/2011	7:41:49 PM	BCl3 MFC set to  0.000000
4/2/2011	7:41:49 PM	PHl3 MFC set to  0.000000
4/2/2011	7:41:49 PM	SiCl4 MFC set to  0.000000
4/2/2011	7:41:49 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	7:41:50 PM	Tube furnace set to 0
4/2/2011	8:01:50 PM	Helium valve closed
4/2/2011	8:01:50 PM	H2 valve closed
4/2/2011	8:01:50 PM	BCl3 valve closed
4/2/2011	8:01:50 PM	PH3 valve closed
4/2/2011	8:01:50 PM	SiCl4 pre valve closed
4/2/2011	8:01:50 PM	SiCl4 post valve closed
4/2/2011	8:01:50 PM	Main Vac valve closed
4/2/2011	8:01:50 PM	Bypass valve closed
4/2/2011	8:01:50 PM	Bubbler valve closed
4/2/2011	8:01:50 PM	Helium MFC set to  0.000000
4/2/2011	8:01:50 PM	H2 MFC set to  0.000000
4/2/2011	8:01:50 PM	BCl3 MFC set to  0.000000
4/2/2011	8:01:50 PM	PHl3 MFC set to  0.000000
4/2/2011	8:01:50 PM	SiCl4 MFC set to  0.000000
4/2/2011	8:01:50 PM	Bypass solenoid MFC set to  0.000000
4/2/2011	8:01:50 PM	Tube furnace set to 0
4/2/2011	8:01:50 PM	Run finished at 8:01 PM
